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FSP8Ⅴ
Category
Defect InspectionOverview
FineSAT Ⅴ can obtain and image data in 20 µm pitch in standard specification and in 10 µm or smaller pitch in optional specification, enabling detailed measurement of a large sample in a single scan. It also enables various image displays that support high-precision analysis/evaluation. Probe frequency (MHz): 5–200
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