Overview

The AMAT / APPLIED MATERIALS ComPLUS 3T wafer inspection system detects defects in devices with design rules of 65nm and below. The AMAT / APPLIED MATERIALS ComPLUS 3T is used for darkfield applications. The The AMAT / APPLIED MATERIALS ComPLUS 3T wafer and mask inspection system can be used for 12" wafers. Applied ComPlus 3T Inspection is a patterned wafer inspection system that performs high-speed inspection of all Darkfield and BEOL Brightfield applications for 65nm production. Using dual-angle illumination and proprietary Enlarged GrayField technology, this single-system solution detects a broad range of defect types at production throughput, enabling faster ramp and higher production yield. Based on the highly successful Compass platform, the ComPlus 3T system transcends the boundaries of traditional darkfield and brightfield inspection, covering the widest optical inspection spectrum with one platform. The ComPlus 3T system solution delivers exceptional advantages in system sensitivity and throughput, as well as significant savings to customers who typically purchase multiple highly specialized inspection tools to cover the same range of applications.