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COMPLUS MP3
Category
Defect InspectionOverview
The AMAT / APPLIED MATERIALS ComPLUS mp3 wafer measurement system is compatible with 300mm wafer size. The MP (multi perspective) option is an expansion on the ComPLUS platform offering capabilities to perform additional brightfield applications, including the detection of defects in the transistor area such as STI, gate, and tungsten plug layers.
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