Description
Spin On Dielectric (SOD)Configuration
No ConfigurationOEM Model Description
The CLEAN TRACK™ ACT™ 12 SOD is spin-on dielectric systems designed to coat, bake, and cure of low-k dielectric materials. Its innovative process modules provides optimally process for organic, inorganic, hybrid, and porous materials. In addition, CLEAN TRACK™ ACT™ 12 SOD equipped in-line curing, which had been traditionally performed in a furnace, by incorporation of high temperature hotplate processing in a low-oxygen environment.Documents
No documents
Verified
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
106450
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
ACT 12 SOD
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
106450
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Spin On Dielectric (SOD)Configuration
No ConfigurationOEM Model Description
The CLEAN TRACK™ ACT™ 12 SOD is spin-on dielectric systems designed to coat, bake, and cure of low-k dielectric materials. Its innovative process modules provides optimally process for organic, inorganic, hybrid, and porous materials. In addition, CLEAN TRACK™ ACT™ 12 SOD equipped in-line curing, which had been traditionally performed in a furnace, by incorporation of high temperature hotplate processing in a low-oxygen environment.Documents
No documents