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    Key Item Details


    Operational Status:

    Product ID:97256

    Wafer Sizes:12"/300mm



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    OEM Model Description

    The CLEAN TRACK™ LITHIUS Pro™/LITHIUS Pro™ ーi is a 300mm process coater/developer that offers enhanced productivity and a significantly decreased footprint. It supports advanced immersion lithography through innovative modules and integrated metrology for advanced process control solutions. This platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership). In summary, the CLEAN TRACK™ LITHIUS Pro™/LITHIUS Pro™ ーi is a highly efficient and cost-effective solution for advanced immersion lithography.

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