Description

Equipment description: 2C

Configuration

No Configuration

OEM Model Description

The SVG 8800 is a single track dispense photoresist spinner that has automatic cassette wafer handling. It can handle 150mm wafers. It has a programmable dispense arm motion that can be programmed temperatures up to 300 C. The SVG 8800's high acceleration brushless spindle motor is capable of attaining 50,000 RPM/second.