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SUSS MicroTec / KARL SUSS GAMMA
    Description
    Cluster Spin Coater System
    Configuration
    configured for 97mm disk, 380V, 3ph, 60Hz, w/ coater module, thermal module w/ 2ea hotplates, 1ea chillplate, 2ea vacuum plate; alignment module. Includes: media storage tank; Julabo F30-CL recirculating chiller; Thermo Neslab RTE7 recirculating chiller, power cabinet; manuals. 50in x 48in x 80in H.
    OEM Model Description
    Priming + Spin Coating + Spray Coating + Baking + Development up to 200 mm
    Documents

    No documents

    SUSS MicroTec / KARL SUSS

    GAMMA

    verified-listing-icon

    Verified

    CATEGORY
    Coaters & Developers

    Last Verified: Yesterday

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    147628

    Wafer Sizes:

    Unknown

    Vintage:

    2008

    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
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    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    147628

    Wafer Sizes:

    Unknown

    Vintage:

    2008

    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Cluster Spin Coater System
    Configuration
    configured for 97mm disk, 380V, 3ph, 60Hz, w/ coater module, thermal module w/ 2ea hotplates, 1ea chillplate, 2ea vacuum plate; alignment module. Includes: media storage tank; Julabo F30-CL recirculating chiller; Thermo Neslab RTE7 recirculating chiller, power cabinet; manuals. 50in x 48in x 80in H.
    OEM Model Description
    Priming + Spin Coating + Spray Coating + Baking + Development up to 200 mm
    Documents

    No documents

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