
Description
The device is disassembled and stored in a warm and dry warehouse. Processable substrates: with Ø 200 mm or 156 mm × 156 mm edge length Maximum thickness: 2 mm Capacity (depending on configuration and layer structure): up to 1200 substrates per hour Cycle time: < 3 seconds Dimensions and weight of the system: Main system dimensions: L × W × H [cm] = 335 × 225 × 155 Main system weight: 3.3 t Media supply: Gases: argon, oxygen, forming gas (Ar:H2 = 95:5), nitrogen High voltage Compressed air Cooling waterConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
Verified
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
134375
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
EVATEC / BALZERS
SOLARIS S151
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
134375
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
The device is disassembled and stored in a warm and dry warehouse. Processable substrates: with Ø 200 mm or 156 mm × 156 mm edge length Maximum thickness: 2 mm Capacity (depending on configuration and layer structure): up to 1200 substrates per hour Cycle time: < 3 seconds Dimensions and weight of the system: Main system dimensions: L × W × H [cm] = 335 × 225 × 155 Main system weight: 3.3 t Media supply: Gases: argon, oxygen, forming gas (Ar:H2 = 95:5), nitrogen High voltage Compressed air Cooling waterConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents