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TEL / TOKYO ELECTRON MARK Vz
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    TEL / TOKYO ELECTRON

    MARK Vz

    Created: January 5, 2023

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    Last Verified: Over 60 days ago

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    Key Item Details

    Condition: As Is

    Product ID: 68202

    Wafer Sizes:

    Vintage: Unknown

    Description

    2D Photoresist 

    Configuration

    No Configuration

    Other Information
    No Other Information Provided
    OEM Model Description

    30 year old coater, generally 75,100,150mm wafers, 60wph - open system, improved throughput over Mark V.

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