Overview

TEL / TOKYO ELECTRON MARK 7 is a Coater and Developer system that can process 8” Wafers. 100,150,200mm wafers, 90wph - system was enclosed for particle reduction. The CLEAN TRACK™ Mark 7/8's was the innovative coater developer system for 5 to 8 inch wafers with further scaling and improved productivity. It inherited the concept of Mark V that released in 1989 as the top-end models. In addition, plus environment control technology which enables stable and excellent performance, The CLEAN TRACK™ Mark 7/8’s supports various type of manufacturing scene from research and development to volume production.