Overview

The CLEAN TRACK™ LITHIUS Pro™ is a 300mm process coater/developer offering enhanced productivity and significantly decreased footprint. It supports advanced immersion lithography through innovative modules and integrated metrology for advanced process control solutions. Additionally, this platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership). The TEL / TOKYO ELECTRON CLEAN TRACK LITHIUS PRO is Coaters and Developers system. The LITHIUS PRO can be used with 2” and 3” wafer size, 200 wph high throughputs with a small footprint.