
Description
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Neslab HX-75W Water Chiller from Plasma Therm PECVD Tool. Water cooled refrigeration system requires water cooling of refrigeration compressor. This chiller was removed from a Plasma Therm tool running in the fab. Temperature Range +5 to +35°C. Cooling Capacity 6820 BTU/HR at 20°C. TU-1 Pump Capacity 3GPM at 50 PSI. 208-230V, 1Ph, 60Hz, 30AOEM Model Description
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Verified
CATEGORY
Chillers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
88940
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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View AllTHERMO / NESLAB
HX+75W
CATEGORY
Chillers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
88940
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Neslab HX-75W Water Chiller from Plasma Therm PECVD Tool. Water cooled refrigeration system requires water cooling of refrigeration compressor. This chiller was removed from a Plasma Therm tool running in the fab. Temperature Range +5 to +35°C. Cooling Capacity 6820 BTU/HR at 20°C. TU-1 Pump Capacity 3GPM at 50 PSI. 208-230V, 1Ph, 60Hz, 30AOEM Model Description
None ProvidedDocuments
No documents