Overview

The S-6000 was Hitachi's pioneering CD-SEM system for micro-scale dimensional measurement of semiconductors. Developed through a collaboration between Hitachi's electron microscope and semiconductor divisions, it aimed to provide a comprehensive measurement solution rather than just hardware. Designed with user-centric features, it eliminated the need for a dark room and offered easy calibration. Adopted globally by semiconductor manufacturers, the S-6000 set a new standard in semiconductor measurement, ensuring high reliability, accuracy, and user-friendliness.