Description
No descriptionConfiguration
Standard configure with 6” and 12” loadOEM Model Description
The S-9380 is Hitachi’s most advanced CD-measurement SEM developed for 65 nm process control of semiconductor devices on wafers up to 300 mm in diameter. With improvement in both hardware and software, the S-9380 supports a high throughput of 33 wafers per hour with 20 measurement points per wafer, and resolution of 2.0 nm.Documents
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HITACHI
S-9380
Verified
CATEGORY
CD-SEM
Last Verified: 27 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
117448
Wafer Sizes:
6"/150mm, 12"/300mm
Vintage:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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HITACHI
S-9380
CATEGORY
CD-SEM
Last Verified: 27 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
117448
Wafer Sizes:
6"/150mm, 12"/300mm
Vintage:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Standard configure with 6” and 12” loadOEM Model Description
The S-9380 is Hitachi’s most advanced CD-measurement SEM developed for 65 nm process control of semiconductor devices on wafers up to 300 mm in diameter. With improvement in both hardware and software, the S-9380 supports a high throughput of 33 wafers per hour with 20 measurement points per wafer, and resolution of 2.0 nm.Documents
No documents