Description
6 to 12 inch depending on model Resolution: 3nm R&D to mass productionConfiguration
No ConfigurationOEM Model Description
The S-9300 is standard equipped with a laser interferometer stage for ultra-high target addressing precision, mini-environment and FOUP compatible loadports. Advanced automation scenarios like FOUP delivery by automatic material handling systems (AMHS) and single wafer identification can be supported.Documents
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HITACHI
S-9300
CATEGORY
CD-SEM
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
131702
Wafer Sizes:
6"/150mm, 8"/200mm, 12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
6 to 12 inch depending on model Resolution: 3nm R&D to mass productionConfiguration
No ConfigurationOEM Model Description
The S-9300 is standard equipped with a laser interferometer stage for ultra-high target addressing precision, mini-environment and FOUP compatible loadports. Advanced automation scenarios like FOUP delivery by automatic material handling systems (AMHS) and single wafer identification can be supported.Documents
No documents