
Description
No descriptionConfiguration
Resolution 5nm, Repeatability 1%, CD range ≥0.1μm Original spec - 6 inch Si OF Modified spec - 4/6inch Si/ SiC (on tray)OEM Model Description
S-8640 high-resolution critical-dimension measurement scanning electron microscopes (CD-SEMs) capable of handling 300-mm wafers.Documents
No documents
HITACHI
S-8640
CATEGORY
CD-SEM
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
131709
Wafer Sizes:
4"/100mm, 6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Resolution 5nm, Repeatability 1%, CD range ≥0.1μm Original spec - 6 inch Si OF Modified spec - 4/6inch Si/ SiC (on tray)OEM Model Description
S-8640 high-resolution critical-dimension measurement scanning electron microscopes (CD-SEMs) capable of handling 300-mm wafers.Documents
No documents