Description
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System Configuration Main Unit x 1 ea Display Console x 1 ea Mini Environment x 1 ea Power Supply unit x 1ea Dry Pump x 2ea Chiller x 1ea Accessories x 1ea System Information System software version : V22 unix or V23 linux workstation - Support Loader System : 12 inch FOUPLoad port (TDK) x 2 CG4000 configuration : CG4000 (12inch Notch, AC208V, 50Hz) 1 Workstation with System Software 1 12” Wafer Holder 1 FOUP Auto Loading System Firmware for Mini-Environment 1 12inch Load Port System 1 Instruction Manual Se 1 Earth Quake Restraint 1 Multi-Point Measurement Software 1 Image Filing Function 1 SEM Condition Monitor 1 ALP/STP Align Sample 1 Vibration remove Stand 1 Signal Tower 1 GEM/HSMS software 1 Workstation Back-up Power supply unit 1 SPM (Surface Potential Measurement) Set 1OEM Model Description
The CG4000 is a cutting-edge solution for process applications, offering advanced functions that enhance both precision and efficiency. Its high-accuracy averaged CD (ACD) metrology function improves repeatability and throughput, while its industry-standard line edge roughness (LER) measurement function contributes significantly to process monitoring. These features make the CG4000 an essential tool for maintaining high standards in process applications.Documents
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HITACHI
CG4000
CATEGORY
CD-SEM
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
130025
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
System Configuration Main Unit x 1 ea Display Console x 1 ea Mini Environment x 1 ea Power Supply unit x 1ea Dry Pump x 2ea Chiller x 1ea Accessories x 1ea System Information System software version : V22 unix or V23 linux workstation - Support Loader System : 12 inch FOUPLoad port (TDK) x 2 CG4000 configuration : CG4000 (12inch Notch, AC208V, 50Hz) 1 Workstation with System Software 1 12” Wafer Holder 1 FOUP Auto Loading System Firmware for Mini-Environment 1 12inch Load Port System 1 Instruction Manual Se 1 Earth Quake Restraint 1 Multi-Point Measurement Software 1 Image Filing Function 1 SEM Condition Monitor 1 ALP/STP Align Sample 1 Vibration remove Stand 1 Signal Tower 1 GEM/HSMS software 1 Workstation Back-up Power supply unit 1 SPM (Surface Potential Measurement) Set 1OEM Model Description
The CG4000 is a cutting-edge solution for process applications, offering advanced functions that enhance both precision and efficiency. Its high-accuracy averaged CD (ACD) metrology function improves repeatability and throughput, while its industry-standard line edge roughness (LER) measurement function contributes significantly to process monitoring. These features make the CG4000 an essential tool for maintaining high standards in process applications.Documents
No documents