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S-7840

Category
CD-SEM
Overview

S-7840 review SEM has been incorporated with (1) ADR (automatic defect review) and ADC (automatic defect classification), (2) data interface with various inspection equipment, (3) an interface which transfers review results with SEM images showing the defects to an advanced data analysis system, and (4) defect sampling function which allows selection of type of defects for reviewing.

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