Description
Missing parts: Tanks N2 heaters Monitor Fluidic fittings Cabinet PanelsConfiguration
- Spray Acid Tool (SAT) - measurement of the chamber opening = approximately 20” - Single Chamber - Up to 12"/300mm capable - Capacity: Single 25-Wafer Cassette, 300mm wafers - 2 Heated Chemical Tank - 1 Pneumatic Trebor Pump for chemical delivery - 3 Fill Vessel - 3 AO Metering Pump - Ozone Catalyst Destruct Unit - Ozone Injection (Ozone Ready) but Ozone the generator not included - Touch Screen Interface - Emergency Off (EMO) - Light Tower - System Power: 208V, 3PH, 40Amp, 50/60Hz - Operator Manuals and documentationOEM Model Description
The Spray Acid Tool (SAT) is a versatile tool that offers a range of cleaning, etching, and stripping capabilities. It features a multichamber design that allows for safe and economical operation in a completely closed environment. The SAT is 300mm ready, meaning it can handle wafers of that size. Some of the specific applications of the SAT include post-CMP clean, photo-resist strip, polymer removal, pre-diffusion clean, monitor wafer clean, and metal etch. These processes are essential for the preparation and maintenance of semiconductor wafers during the manufacturing process.Documents
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SEMITOOL
SAT
Verified
CATEGORY
Wet processing
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
58652
Wafer Sizes:
12"/300mm
Vintage:
Unknown
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SEMITOOL
SAT
Verified
CATEGORY
Wet processing
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
58652
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Missing parts: Tanks N2 heaters Monitor Fluidic fittings Cabinet PanelsConfiguration
- Spray Acid Tool (SAT) - measurement of the chamber opening = approximately 20” - Single Chamber - Up to 12"/300mm capable - Capacity: Single 25-Wafer Cassette, 300mm wafers - 2 Heated Chemical Tank - 1 Pneumatic Trebor Pump for chemical delivery - 3 Fill Vessel - 3 AO Metering Pump - Ozone Catalyst Destruct Unit - Ozone Injection (Ozone Ready) but Ozone the generator not included - Touch Screen Interface - Emergency Off (EMO) - Light Tower - System Power: 208V, 3PH, 40Amp, 50/60Hz - Operator Manuals and documentationOEM Model Description
The Spray Acid Tool (SAT) is a versatile tool that offers a range of cleaning, etching, and stripping capabilities. It features a multichamber design that allows for safe and economical operation in a completely closed environment. The SAT is 300mm ready, meaning it can handle wafers of that size. Some of the specific applications of the SAT include post-CMP clean, photo-resist strip, polymer removal, pre-diffusion clean, monitor wafer clean, and metal etch. These processes are essential for the preparation and maintenance of semiconductor wafers during the manufacturing process.Documents
No documents