Description
No descriptionConfiguration
Barrel type photoresist asher. The process gas is oxygen (O2). The system is for the stripping of photoresist -Power Range: < 200 W -Pressure Range: < 500 mTorr -Included: RF Generator/Power Supply (120 V 60hz), Vacuum pump, and chamberOEM Model Description
AshersDocuments
No documents
TEGAL
PLASMALINE 421
Verified
CATEGORY
Ashers / Plasma Cleaner
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
101880
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEGAL
PLASMALINE 421
CATEGORY
Ashers / Plasma Cleaner
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
101880
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Barrel type photoresist asher. The process gas is oxygen (O2). The system is for the stripping of photoresist -Power Range: < 200 W -Pressure Range: < 500 mTorr -Included: RF Generator/Power Supply (120 V 60hz), Vacuum pump, and chamberOEM Model Description
AshersDocuments
No documents