Description
Glow Research provides the parts and equipment necessary to maintain our plasma systems Upgraded several Nordson March PX-500 Chamber door gaskets Swagelok Valve for Two Gas Inputs : - Connects to the back of a Glow Research Plasma System. Allows the user to run one gas, two gases or a combination of both gases. The flow is regulated into the chamber by the rotameter on the front of the Glow Research Plasma System. Manually Adjusted Vacuum Pump Valve :- Use to lower the amount of vacuum pull on the plasma chamber. When properly adjusted this manual valve will lower the amount of turbulence inside the plasma chamber as the plasma system’s vacuum valve opens (at the start of the chamber pump down). Quartz and Aluminum Wafer Boats :-Quartz and aluminum wafer boats for 4″ wafers. The aluminum wafer carrier holds a quantity of 20 4″ (100 mm) wafersConfiguration
No ConfigurationOEM Model Description
Plasma Treatment SystemDocuments
No documents
Verified
CATEGORY
Ashers / Plasma Cleaner
Last Verified: 21 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
138404
Wafer Sizes:
4"/100mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NORDSON / MARCH
PX-500
CATEGORY
Ashers / Plasma Cleaner
Last Verified: 21 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
138404
Wafer Sizes:
4"/100mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Glow Research provides the parts and equipment necessary to maintain our plasma systems Upgraded several Nordson March PX-500 Chamber door gaskets Swagelok Valve for Two Gas Inputs : - Connects to the back of a Glow Research Plasma System. Allows the user to run one gas, two gases or a combination of both gases. The flow is regulated into the chamber by the rotameter on the front of the Glow Research Plasma System. Manually Adjusted Vacuum Pump Valve :- Use to lower the amount of vacuum pull on the plasma chamber. When properly adjusted this manual valve will lower the amount of turbulence inside the plasma chamber as the plasma system’s vacuum valve opens (at the start of the chamber pump down). Quartz and Aluminum Wafer Boats :-Quartz and aluminum wafer boats for 4″ wafers. The aluminum wafer carrier holds a quantity of 20 4″ (100 mm) wafersConfiguration
No ConfigurationOEM Model Description
Plasma Treatment SystemDocuments
No documents