Description
Branson/IPC 4150 Dry Plasma Etcher Asher, Plasma Cleaner System for up to 12 inch wafersConfiguration
Reactor center, with 16″ (dia) x 30″ (D) aluminum chamber 13 inch Farady cage for 12 inch wafers. New PC controller with main control board, PC board, DC Power, Gas lines with MFCs and 15 inch touch screen monitor 1500W automatch network 1000W ENI RF Generator, 13.56MHz 2 gas inputs. Maximum 3 gases. Vacuum pressure measurement and controlOEM Model Description
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BRANSON
4150
CATEGORY
Ashers / Plasma Cleaner
Last Verified: 20 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
138401
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Branson/IPC 4150 Dry Plasma Etcher Asher, Plasma Cleaner System for up to 12 inch wafersConfiguration
Reactor center, with 16″ (dia) x 30″ (D) aluminum chamber 13 inch Farady cage for 12 inch wafers. New PC controller with main control board, PC board, DC Power, Gas lines with MFCs and 15 inch touch screen monitor 1500W automatch network 1000W ENI RF Generator, 13.56MHz 2 gas inputs. Maximum 3 gases. Vacuum pressure measurement and controlOEM Model Description
None ProvidedDocuments
No documents