ZYGO

GPI XP

NewView 6300

The NewView 5000 an addition to the universally recognized NewView product line of 3-D Surface Profilers. It is a “next generation” metrology system developed by ZYGO, the world’s leader in precise, noncontact, 3-D surface metrology. The NewView 5000 delivers precise, fast, accurate, 3-D areal surface measurements with superior vertical resolution, going beyond the capabilities of other systems available today. It has proven to be an invaluable tool in precisely characterizing and quantifying surface texture, step heights, critical dimensions, and more.

NewView 5000

MARK GPI-XPS 

SPHERE

Base optical profiler with a high resolution camera, manually interchangeable single field zoom lens, filter tray, aperture stop, and a turret compatible closed loop transducer. Model 7300 has all the features of Model 7200 plus- an aperture stop, an enhanced illuminator, a higher speed camera, and an automatic three-position field zoom lens turret.

NewView 7300

The Zygo Mark II Interferometer System* is designed for measurement problems requiring high precision, noncontact, nondestructive evaluation of specular plano or spherical surfaces in reflection, or components or systems in transmission. The key modules in the Interferometer System consist of the Mark II Mainframe and the Video Monitor. An optional Model VP-2 Video Printer may also be added to provide hard-copy output. Each of the system modules is described in detail in this section.

MARK II

GPI-4T AT WS 1600

CP300

The KMS-400 Critical Dimension Measurement and Inspection System is a completely automated pattern recognition and measurement
system. The combination of high-resolution capabilities, a confocal microscope with a shallow depth of focus, and pattern recognition routines allow for easy
capture of optical images for measurement.

KMS400

NewView 6000

The ZeGage™ Plus is an expansion version of the ZeGage profi ler. It provides improved precision and a faster top measurement speed. It also increases the range of measurable surfaces and features. ZeGage Plus retains the ease of use, vibration robustness, and small footprint of the standard ZeGage.

Zegage Plus

AutoKMS 100	

ZARIS

AMS 310RT

ZMI 7714

MARK IV

MARK III-01

GPI LC

GPI-XP/D

The Verifire™ Laser Interferometer is a metrology system that provides fast and reliable measurements of surface form error, and transmitted wavefront of optical components, systems, and assemblies. The Verifire™ interferometer system is a true laser Fizeau design that expands upon ZYGO’s unmatched experience in surface form metrology. The system uses a ZYGO-manufactured HeNe laser source combined with ZYGO’s patented acquisition algorithms and full-featured Mx™ metrology software to enable high-precision metrology with easy-to-use analysis capabilities. This makes the Verifire™ Laser Interferometer an essential tool for any optics shop looking to achieve the highest levels of precision and accuracy in their measurements.

VERIFIRE

EUV-L Micro-Field Exposure Tools with 0.5NA, known as MET5.  The tools are used for infrastructure development required for the EUV lithography industry to support printing at the ~12nm node and below. 

MET5

Met3

NV5000 / 5032DS

NV5000 / 5020DS	

ZeGage

Nexview™ NX2

NV 5032

The NewView 9000 is a 3D optical profiler that offers high-accuracy, fast, and easy-to-use measurements at an attractive price point. It has a triple-zoom turret, a large-area 1.9 MP sensor, high-speed measurements, automated part focus and setup, gage-capable performance, vibration robust metrology, SmartPSI™ technology, 2D and 3D correlation, and Mx™ software. The profiler features an open work area with clear lines of sight and a variety of sample staging options. It is well suited for benchtop installations and can be used as a production-style system with the optional stand and workstation.

NewView 9000

7702

7701

7712

The UniFire 7900 optical metrology system provides high precision, three-dimensional topography information to control high volume manufacturing processes. The UniFire 7900 is used for surface topography, critical dimensions, overlay/registration, and film thickness process control all within a small footprint.

ZYGO

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