YES provides patented technologies and groundbreaking processes to optimize throughput, scalability, and speed.

EcoClean is a high throughput, low-cost of ownership, single-wafer photoresist removal system designed by Yield Engineering Systems (YES). The system uses an ICP remote source to generate atomic oxygen, which chemically reacts with the photoresist on the wafer surface. By employing a downstream resist strip process, EcoClean achieves a high removal rate without causing any electrical damage or defects to the substrates and devices. Additionally, EcoClean offers automated processing with low gas usage and is an eco-friendly “green” solution. This makes it an ideal choice for those looking for an efficient and environmentally responsible way to remove photoresist from wafers.

EcoClean

310TA

PB-6-8P

PB450

450PB 12-2P-CP

1518 SME

YES-PB8-2P-CP-HV

IMIEC 5

450PB6-2P-CP

YES-15F

450PB8-2P

450PB8-2P-CP

VertaCure XP	

The YES EcoCoat® system provides excellent control of the process environment by combining the latest advances in chemical vapor deposition technologies with YES plasma cleaning. This minimizes chemical usage while achieving a consistent substrate surface. It also creates the flexibility to use a wide range of organosilanes in small sample sizes to help significantly improve the cost-effectiveness for research applications requiring precise surface modification. When ready to scale to high-volume production, transition seamlessly up to the high-volume production UltraCoat system.

EcoCoat

PB8-2HV-US

The YES 450PB-6-8P is a high-temperature bake oven designed and manufactured by YES. The oven is capable of operating at temperatures up to 450°C and can accommodate up to 8 cassettes of 6-inch wafers. It features four compartments, each with an 8 x 8 x 15 inch deep chamber. The oven is equipped with a CTC Controller and a Color Touchscreen for easy operation. It is suitable for a wide range of process requirements, including polyimide bake, SOG, flat panel, BCB Bake, and more! This oven is a versatile and reliable choice for high-temperature baking processes.

YES

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EcoClean

R1

8

310TA

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