SPS supply a range of industry leading products used worldwide for Wafer Handling & Shipping, Wet Process/CMP, Photolithography, and Thin Films (including Diffusion, CVD, Etch). SPS-Europe offer POLOS and SPIN150i series high-quality, all plastic single substrate spin coaters since 2003.

A high-capacity, advanced-configuration spin processor engineered for precision coating, cleaning, developing, etching, and rinsing

SPS-EUROPE / POLOS

SPIN300x

HOTPLATE 350

The low-cost SPIN150i spin coater is suitable for processing fragments as small as 5 mm up to Ø150 (or 6”) or 4" x 4" substrates. Detachable touch panel. Unlimited Program Storage for recipes with multiple steps each (CW & CCW rotation for puddle spin coating applications.)

SPIN150i

Material: Table-top System
Max substrate size: 100 x 100 mm
Wavelength: 0.3 - 0.6 - 0.9 μm (5 µm optional)
Resolution: 405 nm (375 nm optional)

SPS-EUROPE / POLOS

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SPIN300x

HOTPLATE 350

SPIN150i

NWA-100

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