The VTP 1500 is a vertical thermal processor that uses model-based temperature control to achieve precise and accurate temperature regulation. It is designed to fit within a small footprint, making it an ideal choice for facilities where space is at a premium. The VTP 1500 is capable of performing both LPCVD (Low Pressure Chemical Vapor Deposition) and diffusion processes, making it a versatile tool for a wide range of semiconductor manufacturing applications.

SEMITOOL / SEMITHERM

VTP 1500

VTP 1500RH

The  EXPRESS is  designed  with  model-based  temperature control technology which provides a shortened period to reach desired processing temperature thereby providing increased  throughput.  The EXPRESS has been redesigned to handle 300mm wafers.

SEMITOOL / SEMITHERM

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VTP 1500

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