PARK SYSTEMS

XE 100

The leading nano metrology tool for failure analysis and large sample research

NX20

NX10

NX-HDM

The Park Systems' XE-PTR is a sophisticated, fully automatic industrial Atomic Force Microscope (AFM) designed primarily for metrology in the manufacture of Read/Write heads. It excels in automatic Pole Tip Recession measurements at various production stages, including Rowbar-level, individual Slider-level, and HGA-level sliders. Offering sub-nano scale accuracy and repeatability, combined with high throughput, the XE-PTR stands out as a preferred metrology tool for Slider manufacturers aiming to enhance their production yield.

XE-PTR

 Automated AFM metrology system for semiconductor and related fabrications. Provides wafer fab inspection and analysis, automatic defect review for bare wafers and substrates, and CMP profile measurements.
Capable of scanning 300 mm wafers

NX-WAFER

XE 300

FX40

FX300

The NX-PTR is a fully automated Atomic Force Microscope (AFM) designed specifically for inline metrology of hard disk head sliders. This advanced instrument offers precise and accurate measurement capabilities, ensuring high-quality control in the production of hard disk head sliders. Its automation features streamline the metrology process, making it an essential tool for efficient and reliable manufacturing in the data storage industry.

PARK SYSTEMS

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XE 100

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