The OPTORUN OTFC-1300 is a high-performance optical coating system that can accommodate chamber sizes ranging from φ 600mm to φ1800mm. It features a 60-point optical thickness monitor and an RF ion source that achieves uniform ion beam distribution over a larger area at high ion current density. The system is capable of depositing over 100 layers using 2 EB guns and a multi-point crucible hearth or annular hearth. It also includes an auto-deposition control system for fully automated processes and offers the option of selecting either a center-driving or planetary substrate dome. The system uses diffusion pumps in combination with Polycold or Cryo-pumps.

OPTORUN

OTFC-1300

OTFC-1550

OTFC-1550DBI 

OTFC-1300DBI

GENER-1300

NSC-15

OTFC-900DBI

RPD-1000

Optical thin film coater for mass production

GENER-2500

OTFC-1300CBI	

OPTORUN

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