NOVA

NOVASCAN 3090

A wide range of 2D/3D and in-die metrology solutions for Dielectric and Copper CMP, Photolithography, Etch and CVD

NS3090Next SA

I500

391-41000-15 REV A

i550R

V2600

NOVESCAN 3060 SA

The NovaScan 2040 and 3060 have an overall measurement time of 13 seconds per wafer for 13 sites, compatible with all high-throughput polishers, enabling measurement and mapping of all wafers both pre- and post-polish without affecting the polisher’s throughput. Nova is the only Integrated Metrology provider to offer both wet and dry integrations allowing customers to choose the best alternative. The NovaScan 2040/3060 utilizes UV Spectrophotometry to accurately measure and map the most advanced applications in the semiconductor industry down to the 0.09µm technology node.

NOVASCAN 2040

T600	

i500 PLUS

T500

NOVA

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NOVASCAN 3090

NS3090Next SA

I500

391-41000-15 REV A

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