µCoater is a benchtop spin coater very easy to use and full of features, it includes an integrated vacuum system with a rotating vacuum chuck for holding the substrates to coat while spinning. You don't need an external vacuum pump. it's integrated inside. It has an all metal body construction (steel and aluminum) with a polypropylene vacuum chuck, the inside of the spinning bowl is coated with a PTFE based material which is very easy to clean. It uses a high quality outrunner brushless motor. These type of motors are very efficient and have very low static friction resulting in a long lifetime.

MUTECH MICROSYSTEMS

µCoater

Mutech microsystems microexposer is a High Value UV exposing system designed for microfabrication applications. It allows the user to perform fast lithography processes on samples and substrates. The system consists of an UV 365nm parallel LED light source and a sliding tray where you can put your photolithography mask and sample to expose. A variety of custom holders and customizations can be provided for your application.

µExposer

Mutech microsystems microAligner is a compact high value UV mask aligner designed for microfabrication applications. It allows for easy fabrication of multilayer devices on a multitude of photoresists, with excellent exposure quality. The easy to use, 7 inch touchscreen based control allows the user to align using the calibrated digital microscope and the X-Y-R micrometer based alignment stage. The fully electronic wafer pressure and gap control allows for easy alignment and very high repeatability of the exposure conditions between processes.

µAligner

μLaser is a high value direct laser lithography writer, oriented to universities and research facilities looking to expand their capabilities. It writes on a photosensitive resist coated surface with a 405nm laser at submicron pixel resolution on big areas. You can write anything from photomasks to research prototypes for basic or applied science, the integrated camera can be used to align the writing with existing features.



MUTECH MICROSYSTEMS

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