MODULAR PROCESS TECHNOLOGY / MPTC

UV-600

Modular process technology RTP-600S Rapid Thermal Processing System.  The integrated process control system features real time graphics, recipe management, data acquisition and has a comprehensive diagnostic function.  Wafer size up to 6 in.  Temp Range 250 to 1300 deg C (I wouldn't take it that high, maybe 1100C for short times).  Quartz chamber (not included).  Up to six channels of MFC control (Equipped with 3 channels).  Highly uniform loop array with accurate control and monitoring.  208V, 3Ph, 60Hz, 80A.


6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

MODULAR PROCESS TECHNOLOGY / MPTC

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UV-600

RTP-600S

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