Fully Automatic Reflectivity Mapping System

EPIPLUS / ETAMAX

UniMAP

PLATO 

LIF 100

• Simultaneous measurement of 3-channel photoluminescence and 1-channel DIC laser microscopy using a 355nm laser source
• Deep learning for defect analysis
• DIC Laser Microscopy Surface Inspection
  – Reflected DIC laser microscope of excitation source (355nm)
  – Carrot, Scratch, Droplets, 3-C triangular defects
• Band edge PL inspection method, additional 2 types of data for user reference
  – BPD, Shockley stacking faults, Bar type stacking faults
• Photoluminescence spectral mapping with spectrometer
  – Whole wafer mapping
  – Spectroscopic analysis for aimed area in map data
• Auto-Navigation Function
  – Auto-defect inspection using spectral measurement using PMT mapping and image processing result
  – Exact stacking faults classification by spectrum analysis

EPIPLUS / ETAMAX

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