EDWARDS

iL70N

IH1000

IH1800

iXH4550HT

iXH6045H

iXH3030

The Edwards QDP40 is a dry vacuum pump that operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated

QDP40

iXH610

E2M18

EPX180LE

PHMB2400 + PRV 

QDP80 / QMB500

"The iQ Drypumping System is a microprocessor-controlled, modular, dry pump package with advanced control and monitoring capabilities. It can be controlled locally via a handheld LCD panel or remotely through a customized tool interface. All major control elements are conveniently located within the system's footprint.

Equipped with integrated sensors, the iQ dry pumping system continuously monitors critical performance parameters and provides early warning of any issues. These sensors measure motor power, current, total and purge nitrogen flow, pump and motor temperatures, as well as additional parameters like exhaust gas back pressure, oil level, water flow, and exhaust gas temperature.

The iQ pumpset parameters can be easily monitored and displayed through various output devices, including handheld or panel-mounted control modules, local PCs or laptops, and OEM-specified tool interfaces. It offers seamless integration with fab-wide networks for comprehensive monitoring and control.
PC as part of a fab-wide network"

iQDP40

iL70

The iQ Drypumping System is a microprocessor-controlled, modular setup offering exceptional control and monitoring capabilities. Users can operate the system locally via a handheld LCD panel or remotely through a customizable interface. Integrated within the system's footprint, it boasts sensors that continuously track critical performance metrics, alerting of potential issues. These sensors monitor motor power, nitrogen flow, pump and motor temperatures, and more, with additional sensors available for exhaust gas back pressure, oil level, and water flow, among others. You can access and display the iQ pumpset data through various devices, including handheld modules, PCs, laptops, or even a fab-wide network.

iQDP80

E2M275

EPX500LE

E2M80

HMB3000

IGX100L

"The QDP80 DRYSTAR Dry pump is available as a stand alone unit or in combination with a QMB500hydrokinetic drive mechanical booster, for applications where more pumping speed and/or lower vacuum levels are required - no pressure switches required.

The scope of supply includes as standard an in-line pressure regulator and gauge for facilitating the shaft seal purge, a cleanable stainless steel exhaust silencer, and exhaust check valve. The QDP80 Drystar dry pump will also be supplied with a full accessory fitting kit and will be mounted to the dedicated chassis and castors to enable easy movement of the pump.

There is no special control system requirements for pump operation, existing electrical control equipment can be modified to provide simple off/on operation and interface to the (fitted) pump thermal snap switches. Details of how to achieve this are available in the Drystar 80 Electrical Box upgrade guide."

QDP80

ESDP12

E2M40

IH80

IPX100A

IH600

IF30K	

QMB500

EPX TWIN 180L

RV12

EPX180NE

IXH1220H

iXL500Q 

E2M5

IGX6/100L

ADP122 LM

PHMB3000 + PRV

STP-301-U

D150

IH1800 HTX

iGX600M

STP-H2000K

The IQDP80 offers two distinct configurations based on the process requirement. For processes like CVD and ETCH, the iQ 80 pump comes combined with a Qmb 1200, 500, or 250 mechanical booster and is fully enclosed, featuring a harsh duty gas module and a dedicated pump display module, all powered by a three-phase electrical supply. Conversely, for clean processes such as Load Lock and PVD, the iQ 80 pump pairs with either a Qmb 500 or 250 mechanical booster and is similarly enclosed, but is equipped with a clean dry gas module and its own pump display module, still using a three-phase electrical supply.

iQDP80 / QMB500

QDP80/QMB250

IH600F AMF

iH600 MK5

The GV80 vacuum pump is capable of continuous operation with the ability to handle large volumes of condensable vapours. With clean, quiet pumping and minimal service disruption, the GV80 provides consistent output and repeatable pumping performance.

GV80

PN D37215000

IGX600L

IGX1000N

iHs600F SMART AFM

nXDS10i

 iF1800 

PHMB3000

QDP40/QMB250

QDP80 / QMB 250F

The Spectra exhaust management system is a cost-effective, reliable and high performance abatement solution for the latest generation of Flat Panel Display (FPD) and Solar Cell manufacturing processes.

SPECTRA G

E2M1.5 

2698800

iL600N

IH1000 MK5	

GVSP 30

iGX600N

ESDP30

iXH1210

GV600

E1M18

IH1800 MK5

E2M8

04-NO26-98-810

QMB250

EH250

STP-XA2703BV2

DP40/EH250

IH1800NRV MK5	

The iH160 system has an HCDP160 dry pump. The HCDP pump has an enclosed, water-cooled motor. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable.

iH160 

iXH1820

E306A	

iGX100N

IH1800HTX MK5	

EH2600

Gas abatement systems are designed to reduce or remove hazardous gases and air pollutants during manufacturing processes

ATLAS MK3B

ATLAS TPU+WESP

iXH1220HTX

EXT75DX

EPX180L

EPX180N

iQDP80 / QMB250

The Pyrophoric Conditioning System (PCS) is a compact, cost-effective unit using the 'self-oxidation' principle to safely remove silane from PECVD and LPCVD process exhausts to below flammable limits

GX600L

IXH 4545 H

i-250

STP-A1303C

two stage oil sealed rotary vane vacuum pumps

E2M175

GXS250F

The Edwards STP-XA3203CV is a high-performance turbomolecular pump designed for efficient and quiet operation. It offers superior pumping speeds, exceptional reliability, and advanced control options. With a compact design, it saves space and is ideal for various industrial applications, ensuring seamless integration and precise adjustments for optimal performance. This pump is a top choice for industries requiring reliable and efficient vacuum solutions. For specific details, pricing, and availability, it's best to refer to the official Edwards website or authorized distributors.

STP-XA3203CV

EDWARDS

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