"The 9600 Compressor is a universal compressor that accepts three-phase 50Hz or 60 Hz power input and provides two-phase or threephase 60Hz power output to On-Board or Cryo-Torr Cryopumps.

The 9600 Compressor design eliminates the use of three-phase motor controllers and/or frequency converters and significantly reduces the amount of equipment required and cost associated with the Cryopump power circuit."

CTI CRYOGENICS

9600

ON-BOARD P300 CRYOPUMP

8500

Cryo-Torr 8

ON-BOARD 8F

Pumping Speeds - litres/sec.
Water Vapour: 4,000
Air: 1,500
Hydrogen: 2,500
Argon: 1,200

ON-BOARD 8

OB-250F

CT-10 is a High-Vacuum Pumping System.
Rough Pump Connection: NW 25 ISO KF
Integrated Hardware: Second Stage Diode

Pumping Speeds: 
Water 9000 liters/sec
Air 3000 liters/sec
Hydrogen 5000 liters/sec
Argon 2500 liters/sec

CT-10

CT-8 is a High-Vacuum Pumping System
CROSSOVER (MAXIMUM GAS BURST) 
150 TORR-LITERS
PUMPING SPEEDS (LITER/SECOND) 
WATER 4,000 AIR 1,500 HYDROGEN 2,500 ARGON 1,200

CT-8

8200 

8300 / 8001

OB-350W

8124115G001

ON-BOARD 4F

The On-Board® cryogenic vacuum pumps feature embedded microprocessor control, enhancing performance, diagnostics, and communication. Paired with intuitive software and user interfaces, these pumps set the global standard for reliability and performance. Designed for critical vacuum processes, the On-Board Cryopump ensures optimal yields and throughput, available in diverse sizes to suit various applications. Key features include ultra-fast regenerations, advanced control systems, oil-free high vacuum pumping, low gas partial pressures, swift pumping speeds for reduced downtime, and suitability for Ion Implantation, PVD, and Sputtering.

OB-8F

ON-BOARD IS

ON-BOARD IS 8F XP

CRYOPUMP

**PARTS**

Cryo-Torr 400

ON-BOARD 10F

OB-8

Cryo-Torr 10

The On-Board® IS 320FX cryopump is designed to deliver the highest hydrogen vacuum pumping speed and capacity possible for improved product yield and tool throughput. Building upon Edwards’ extensive cryogenic pump design expertise, this cryopump outperforms all other comparably sized pumps while meeting rigorous safety guidelines. 

ON-BOARD IS 320FE 

8510

ON BOARD 400	

8120961G001

8300

WATERPUMP

OB-10

9700A

OB-250

OB-320F

The On-Board® IS-1000 andIS-2000V compressors support new and existing On-Board® IS Cryopump applications. They leverage proven On-Board® IS technology: intelligent system controls, cryopump solution integration, robust electronics and software. Like the rest of our range, they enable multiple pump configurations with the most efficient and cost effective helium management solution.

IS-1000

CTI CRYOGENICS

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9600

ON-BOARD P300 CRYOPUMP

8500

Cryo-Torr 8

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