-Small spot size same as 100kV tool but more stable
-High Beam position resolution-0.0012nm minimum address size with FSM
-Proper Stigmation & Focusing adjustment with Clear SEM
-Stable beam position for a long period of time
-Uniformed Beam current in the field
-Stable Beam current for a long time
-Noise reduction by specially designed of P/S & Permalloy box.
-Initial correction of field distortion has to be done properly for good stitching
-Deflection has to be electrostatic deflection for good stitching
-Unique way to use laser interferometer prevent measurement error for good stitching
-Self thermal control minimizes the measurement error for good stitching

Many writing functions
- Vector (X-Y),
- Vector (X-Theta),
- Raster,
- Spot,
- Axial symmetrical Pattern writing,
- Field Size Modulation,
- Spot scan,
- 3D pattern writing

-Proximity effect correction
-Multi user environment – saving parameters for each different users
-User friendly – Windows Xp based software and DXF & GDSII conversion
-Flexible customization – Different Palette Holder

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