CLASSONE TECHNOLOGIES

8800 SRD

8600

4600

4800 SRD

2800 SRD

8800HP SRD

8600 SRD

4600 SRD

The Trident™ Spray Solvent Tools (SST) from ClassOne Technology are the next generation of batch-processing systems for metal lift-off, photoresist strip, polymer removal, and other solvent-based processes. Trident Spray Solvent Tool models are available for up to 200mm substrates — with two, four, or six heated chemical tanks; and a wide range of rotors. ClassOne can accommodate a range of wafer sizes, engineering rotors for most shapes and sizes. These systems include ClassOne’s proven Windows®10-based Solaris™ controller and provide remote login, data logging, GEM/SECSII communications, and reliability reporting.

TRIDENT SST

4800HP SRD

SOLSTICE LT

The Trident™ SRD Spin Rinse Dryers from ClassOne Technology provide state-of-the-art cleaning, rinsing, and drying of wafers after wet processing, for chemical or residue removal without leaving water spots or films. These tools utilize DI water rinse followed by N2 drying. The systems’ non-contact heating results in cleaner N2 because a filter is positioned after the heater to eliminate direct contact between the N2 and heater.

Trident 8800HP – Dual-stack SRD, able to use high-profile 200mm cassettes

Trident 8800HP

2600 SRD

4900 SRD

CLASSONE TECHNOLOGIES

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8800 SRD

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4800 SRD

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