BROOKS AUTOMATION

MTX 2000

FIXLOAD 6M	

Brooks Automation Reliance ATR8 Wafer Transfer Robot

ATR-8

MTX 4000	

Series 8 Controller

FIXLOAD 25

PRE 200

107434

002-7200-21

PRE 300

FIXLOAD 6

DBM 2406

5850E

MULTITRAN 5

002-9401-01

APS 2000

MTX2000/2

The Brooks Automation Jet system is an Equipment Front End Module or EFEM. It is the link between the factory’s Material Transport System and the Process Tool.

152465

S9 JET

FIXLOAD V6

002-7391-33

0162770-02

127000-138

013096-057-20

MAGNATRAN 70

121655

ERGOSPEED II

SCS 2000

SCS 3000

The unified wafer management system gives the Spartan™ Sorter the minimum scale and complexity required to accomplish its core job: to move wafers as cleanly and as quickly as possible. The Spartan Sorter offers improved reliability and maximized efficiency while delivering industry-leading cleanliness with the lowest particle levels.

Ease of set-up and serviceability are key attributes of the Spartan Sorter. Its simple, scalable architecture is easy to service and maintain. Fully compliant with SEMI standards, the Spartan Sorter is available in several options to support various sorting applications.

Spartan Sorters

MX400 Magnatran 7

SENTRY 1510

002-7391-15

BACKBORN

MPO-1000

MX400

M1900	

MTX 4020 

APS 2XT

METARA 7200

ABM407B

ULTRASORT 408

BROOKS AUTOMATION

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MTX 2000

FIXLOAD 6M

ATR-8

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