ADVANCED ENERGY

APEX-1513	

PDX-900-2V	

PINNACLE-20K	

PINNACLE-10K

APEX-3013	

NAVIGATOR-3013	

RAPID-F	

RFX-600

RFX 600A	

MDX 10K	

PDX 2500

HFV-8000	

NAVIGATOR-1013

ATX-600	

NAVIGATOR-2013	

CESAR 1312

RFX II 3000

The Advanced Energy RFG 2000-2V is a specialized radio frequency (RF) power supply meticulously crafted for plasma-based processes, with a primary focus on semiconductor manufacturing and other applications demanding precise and controlled RF power.

RFG 2000-2V

Apex 5513

PINNACLE plus 10K

PINNACLE 6K

OVATION-35162

RFG 3000

MDX-15K

The Advanced Energy (AE) Paramount 3013 provides improved Common Exciter (CEX) performance and enhanced reliability over the existing RFG 3kW generator, which has proven particularly useful in implanter tool installations..

PARAMOUNT 3013

PDX 1400

MDX-L12	

VHF-2060

Sparc-le-V

MDX-5K

PE-2500

MDX-L12M-650

PARAMOUNT-6013

PARAMOUNT 1513

MDX-L6

PE II 10K 400V 

PINNACLE 15K

low-power series of mid-frequency power supplies 

PDX 1250

OVATION 2760

Economical, Digital, Configurable Matching Network Solution
The Navio matching network delivers quick, accurate, and repeatable impedance across many applications.

Plug-and-play installation with Advanced Energy’s RF power supplies for thin film applications
Efficient and stable power delivery
Compact and air-cooled (standard package or slim version)


NAVIO

XSTREAM-8K	

RF-5S	

The Sparc-le 20 (Small Package Arc Repression Circuit- Low Energy) 20 kHz unit is an add-on accessory for the Advanced Energy magnetron drive power supplies with output currents under 25 A.

Sparc-le 20

**PARTS**

PE-1000

VM-5000	

The Advanced Energy RFG 5500 is a cutting-edge, high-frequency, solid-state RF power supply tailored for plasma-based processes in industries like semiconductor manufacturing, plasma etching, and thin film deposition. Its main purpose is to provide accurate and dependable power to plasma sources, ensuring superior performance in a wide range of applications. With its advanced technology and design, the RFG 5500 is a trusted choice for delivering precise and reliable power in plasma-related operations.

RFG 5500

CESAR 1310

AM-5	

Pinnacle Plus+

RFX II 1250

VM1500W-ICP

2011-000-D

Compact, CE-Marked, Mid-Frequency Power Supply

PDX 8000

ASPECT 5013

OVATION-2560

CESAR 2710

PE 5000

PE II 10K

The PDW 2200 plasma generator supplies from 0-2200 W of power at a fixed frequency of 400 kHz. The RF output is sinusoidal, and at full rated power, all harmonics are 50 dB below the power level of the fundamental. The PDW is well suited to chemical vapor deposition (CVD), etching, dielectric sputtering, plasma polymer systems, and other applications where a pure high-power waveform is desired at this frequency. The PDW's precise control of power optimizes electrical moding, specific specie production, control of stress, and gas transport interactions.

PDW-2200

PARAMOUNT MF 5002

0190-13025

ION SOURCE SUPPLY	

The Litmas RPS is a remote plasma source that delivers high concentrations of reactive gas species to enable effective abatement of environmentally harmful PFC gases. Its small footprint, high performance, ease of use, and low cost of ownership set it apart from competitive abatement solutions that require high upfront investment and high operating cost. 

LITMAS RPS

MDX-20K	

PARAMOUNT MF 3KW	

ULVAC MDL-15

VM 1000A

APEX 2013

RFG-3001	

RF-5

The Advanced Energy MDX-L12M is a highly reliable and widely used power supply from the MDX Series. It is specifically designed to cater to low-power applications that require robust and precise power delivery. With three available models - 500 W, 1 kW, and 1.5 kW - it offers flexibility to meet various power requirements.

MDX-L12M

The Advanced Energy (AE) E-Wave bipolar pulsed DC power supply improves surface uniformity and reduces additive consumption for the copper-plating phase of dual-dam-ascene process flow (DDPF) application. The E-Wave power supply offers up to three channels, each of which independently driven bipolar power source and is capable of producing, storing, and running up to 15 current-controlled or voltage-controlled waveforms

E-WAVE

CESAR 1320

MDX MAGNETRON DRIVE

Output power: 20,000W. Output frequency: 30 to 300 kHz. Output voltage: 440V. 460V, 3 Ph, 60 Hz

TCM 3155031-000G

PARAMOUNT PLUS

RFG 1250 HALO

the MDX Series diligently serves low-power applications where robust, accurate power delivery is a must.

-Available in 500 W, 1 kW, and 1.5 kW models
-Excellent process results with low stored energy
-Backed by Advanced Energy's Global Service organization

MDX 500

3155162-014

The RFG 1251 generator provides high accuracy power regulation

RFG 1251

MDX-L18M

RF-20RWC

MDX-L6M-650

RFDS 2000-2V

PDX 5000

RFDS-1250

MDX PINNACLE

RFG 1250

ADVANCED ENERGY

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