ADVANCED ENERGY

3155162-014

AM-5	

RFDS-1250

MERCURY 3013

Output power: 20,000W. Output frequency: 30 to 300 kHz. Output voltage: 440V. 460V, 3 Ph, 60 Hz

TCM 3155031-000G

MDX-L18M

RFDS 2000-2V

PARAMOUNT PLUS

The RFG 1251 generator provides high accuracy power regulation

RFG 1251

Pinnacle Plus+

MDX-L6M-650

PARAMOUNT VHF 3060

RFG 1250

RF-5S	

MDX-L12-650

MDX MAGNETRON DRIVE

RF-20RWC

MDX II

RF-5

APEX-3013

APEX-1513	

PDX-900-2V	

PINNACLE-10K

PINNACLE-20K	

RAPID-F	

MDX 10K	

NAVIGATOR-3013	

RFX 600A	

RFX-600

NAVIGATOR-1013

low-power series of mid-frequency power supplies 

PDX 1250

The Advanced Energy RFG 5500 is a cutting-edge, high-frequency, solid-state RF power supply tailored for plasma-based processes in industries like semiconductor manufacturing, plasma etching, and thin film deposition. Its main purpose is to provide accurate and dependable power to plasma sources, ensuring superior performance in a wide range of applications. With its advanced technology and design, the RFG 5500 is a trusted choice for delivering precise and reliable power in plasma-related operations.

RFG 5500

RF-10S

HFV-8000	

PDX 2500

CESAR 1312

MDX-5K

RFG 3000

RFX II 3000

Apex 5513

ATX-600	

PINNACLE 6K

PINNACLE plus 10K

The Advanced Energy MDX-L12M is a highly reliable and widely used power supply from the MDX Series. It is specifically designed to cater to low-power applications that require robust and precise power delivery. With three available models - 500 W, 1 kW, and 1.5 kW - it offers flexibility to meet various power requirements.

MDX-L12M

MDX-15K

MDX-20K	

The Advanced Energy (AE) Paramount 3013 provides improved Common Exciter (CEX) performance and enhanced reliability over the existing RFG 3kW generator, which has proven particularly useful in implanter tool installations..

PARAMOUNT 3013

CESAR 1310

OVATION 2760

PDX 1400

PARAMOUNT-6013

OVATION-35162

The Advanced Energy RFG 2000-2V is a specialized radio frequency (RF) power supply meticulously crafted for plasma-based processes, with a primary focus on semiconductor manufacturing and other applications demanding precise and controlled RF power.

RFG 2000-2V

PE-2500

ULVAC MDL-15

NAVIGATOR-2013	

Sparc-le-V

VHF-2060

R1912078700

Economical, Digital, Configurable Matching Network Solution
The Navio matching network delivers quick, accurate, and repeatable impedance across many applications.

Plug-and-play installation with Advanced Energy’s RF power supplies for thin film applications
Efficient and stable power delivery
Compact and air-cooled (standard package or slim version)


NAVIO

MDX-L12M-650

XSTREAM-8K	

PE-1000

PARAMOUNT 1513

PINNACLE 15K

0190-13025

PE II 10K 400V 

MDX-L12	

**PARTS**

VM-5000

Compact, CE-Marked, Mid-Frequency Power Supply

PDX 8000

The Litmas RPS is a remote plasma source that delivers high concentrations of reactive gas species to enable effective abatement of environmentally harmful PFC gases. Its small footprint, high performance, ease of use, and low cost of ownership set it apart from competitive abatement solutions that require high upfront investment and high operating cost. 

LITMAS RPS

PDX 5000

OVATION-2560

PARAMOUNT MF 3KW

RFX II 1250

MDX 2.5K

The PDW 2200 plasma generator supplies from 0-2200 W of power at a fixed frequency of 400 kHz. The RF output is sinusoidal, and at full rated power, all harmonics are 50 dB below the power level of the fundamental. The PDW is well suited to chemical vapor deposition (CVD), etching, dielectric sputtering, plasma polymer systems, and other applications where a pure high-power waveform is desired at this frequency. The PDW's precise control of power optimizes electrical moding, specific specie production, control of stress, and gas transport interactions.

PDW-2200

VM 1000A

CESAR 2710

2011-000-D

PE II 10K

The Sparc-le 20 (Small Package Arc Repression Circuit- Low Energy) 20 kHz unit is an add-on accessory for the Advanced Energy magnetron drive power supplies with output currents under 25 A.

Sparc-le 20

The Advanced Energy (AE) E-Wave bipolar pulsed DC power supply improves surface uniformity and reduces additive consumption for the copper-plating phase of dual-dam-ascene process flow (DDPF) application. The E-Wave power supply offers up to three channels, each of which independently driven bipolar power source and is capable of producing, storing, and running up to 15 current-controlled or voltage-controlled waveforms

E-WAVE

PARAMOUNT MF 5002

VM1500W-ICP

APEX 2013

ASPECT 5013

MDX PINNACLE

RFG 1250 HALO

the MDX Series diligently serves low-power applications where robust, accurate power delivery is a must.

-Available in 500 W, 1 kW, and 1.5 kW models
-Excellent process results with low stored energy
-Backed by Advanced Energy's Global Service organization

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

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3155162-014

AM-5

RFDS-1250

MERCURY 3013

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