ADVANCED ENERGY

APEX-1513	

APEX-3013

PDX-900-2V	

PINNACLE-10K

PINNACLE-20K	

RF-10S

RAPID-F	

NAVIGATOR-3013	

MDX 10K	

low-power series of mid-frequency power supplies 

PDX 1250

RFX-600

RFX 600A	

NAVIGATOR-1013

The Advanced Energy RFG 5500 is a cutting-edge, high-frequency, solid-state RF power supply tailored for plasma-based processes in industries like semiconductor manufacturing, plasma etching, and thin film deposition. Its main purpose is to provide accurate and dependable power to plasma sources, ensuring superior performance in a wide range of applications. With its advanced technology and design, the RFG 5500 is a trusted choice for delivering precise and reliable power in plasma-related operations.

RFG 5500

PDX 2500

HFV-8000	

MDX-5K

RFG 3000

RFX II 3000

CESAR 1312

ATX-600	

The Advanced Energy RFG 2000-2V is a specialized radio frequency (RF) power supply meticulously crafted for plasma-based processes, with a primary focus on semiconductor manufacturing and other applications demanding precise and controlled RF power.

RFG 2000-2V

The Advanced Energy (AE) Paramount 3013 provides improved Common Exciter (CEX) performance and enhanced reliability over the existing RFG 3kW generator, which has proven particularly useful in implanter tool installations..

PARAMOUNT 3013

MDX-20K	

Apex 5513

PINNACLE 6K

MDX-15K

CESAR 1310

PARAMOUNT-6013

PINNACLE plus 10K

OVATION-35162

Compact, CE-Marked, Mid-Frequency Power Supply

PDX 8000

PDX 1400

MDX-L12	

OVATION 2760

VHF-2060

NAVIGATOR-2013	

PE-2500

R1912078700

The Advanced Energy MDX-L12M is a highly reliable and widely used power supply from the MDX Series. It is specifically designed to cater to low-power applications that require robust and precise power delivery. With three available models - 500 W, 1 kW, and 1.5 kW - it offers flexibility to meet various power requirements.

MDX-L12M

Sparc-le-V

MDX-L12M-650

VM-5000	

Economical, Digital, Configurable Matching Network Solution
The Navio matching network delivers quick, accurate, and repeatable impedance across many applications.

Plug-and-play installation with Advanced Energy’s RF power supplies for thin film applications
Efficient and stable power delivery
Compact and air-cooled (standard package or slim version)


NAVIO

XSTREAM-8K	

**PARTS**

PE-1000

PE II 10K

ULVAC MDL-15

PE II 10K 400V 

PINNACLE 15K

PARAMOUNT 1513

CESAR 2710

PARAMOUNT VHF 3060

The Advanced Energy (AE) E-Wave bipolar pulsed DC power supply improves surface uniformity and reduces additive consumption for the copper-plating phase of dual-dam-ascene process flow (DDPF) application. The E-Wave power supply offers up to three channels, each of which independently driven bipolar power source and is capable of producing, storing, and running up to 15 current-controlled or voltage-controlled waveforms

E-WAVE

The Litmas RPS is a remote plasma source that delivers high concentrations of reactive gas species to enable effective abatement of environmentally harmful PFC gases. Its small footprint, high performance, ease of use, and low cost of ownership set it apart from competitive abatement solutions that require high upfront investment and high operating cost. 

LITMAS RPS

VM 1000A

RFG 1250 HALO

RFDS 2000-2V

the MDX Series diligently serves low-power applications where robust, accurate power delivery is a must.

-Available in 500 W, 1 kW, and 1.5 kW models
-Excellent process results with low stored energy
-Backed by Advanced Energy's Global Service organization

MDX 500

APEX 2013

ASPECT 5013

2011-000-D

MDX-L12-650

The PDW 2200 plasma generator supplies from 0-2200 W of power at a fixed frequency of 400 kHz. The RF output is sinusoidal, and at full rated power, all harmonics are 50 dB below the power level of the fundamental. The PDW is well suited to chemical vapor deposition (CVD), etching, dielectric sputtering, plasma polymer systems, and other applications where a pure high-power waveform is desired at this frequency. The PDW's precise control of power optimizes electrical moding, specific specie production, control of stress, and gas transport interactions.

PDW-2200

VM1500W-ICP

ION SOURCE SUPPLY	

MDX PINNACLE

The Sparc-le 20 (Small Package Arc Repression Circuit- Low Energy) 20 kHz unit is an add-on accessory for the Advanced Energy magnetron drive power supplies with output currents under 25 A.

Sparc-le 20

PARAMOUNT MF 3KW	

RFX II 1250

MDX 2.5K

CESAR 1320

OVATION-2560

PE 5000

RF-5

MDX-L6

PARAMOUNT MF 5002

0190-13025

RFG-3001	

The RFG 1251 generator provides high accuracy power regulation

RFG 1251

Output power: 20,000W. Output frequency: 30 to 300 kHz. Output voltage: 440V. 460V, 3 Ph, 60 Hz

TCM 3155031-000G

RFG 1250

MDX-L6M-650

RFDS-1250

AM-5	

MDX-L18M

3155162-014

RF-5S	

RF-20RWC

PDX 5000

Pinnacle Plus+

PARAMOUNT PLUS

MDX MAGNETRON DRIVE

ADVANCED ENERGY

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