Overview

Pantheon is a system developed by Aviza that is designed to meet the process and productivity requirements of today and beyond the 90-nanometer node. It is a multi-chamber single wafer cluster tool that can be configured for both 200mm and 300mm wafer sizes. The system offers precise atomic-level thickness control, low process temperature, and highly conformal coatings with excellent film quality for a wide range of films, including Al2O3, HfO2, TiO2, HfSiOx, and TiN.