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Marketplace > ALD > ARRADIANCE > GEMStar XT-S/DP

GEMStar XT-S/DP

Category
ALD
Overview

The GEMStar XT-DPTM Plasma Enhanced Atomic Layer Deposition (PEALD)system extends the capabilities of the GEMStar XTTM Thermal system to include best in class plasma processing through the full range of substrates.

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