Description
Atomic Force Profiler (AFP)Configuration
No ConfigurationOEM Model Description
The Dimension® AFP is the world’s only fab-based metrology tool specifically designed for both CMP profiling and etch depth metrology for current and advanced technology nodes. The system combines the superb resolution of an AFM with the long-scan capability of an atomic force profiler to monitor etch depth and dishing and erosion on submicron features with unsurpassed repeatability. Replacing costly wafer cross-sectioning, the Dimension AFP offers the highest performance available for device characterization.Documents
No documents
CATEGORY
AFM
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
119846
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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BRUKER / VEECO / DIGITAL INSTRUMENTS
DIMENSION AFP
CATEGORY
AFM
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
119846
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Atomic Force Profiler (AFP)Configuration
No ConfigurationOEM Model Description
The Dimension® AFP is the world’s only fab-based metrology tool specifically designed for both CMP profiling and etch depth metrology for current and advanced technology nodes. The system combines the superb resolution of an AFM with the long-scan capability of an atomic force profiler to monitor etch depth and dishing and erosion on submicron features with unsurpassed repeatability. Replacing costly wafer cross-sectioning, the Dimension AFP offers the highest performance available for device characterization.Documents
No documents