FPA-6000ES5
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Steppers & ScannersOverview
The Canon FPA-6000ES5 is a KrF (248nm) scanner built on Canon’s 300mm-ready FPA-6000 single-stage platform. It has an 0.80 numerical aperture and an ultra-low aberration 4:1 reduction lens system, capable of projecting IC features as small as 110nm. It is aimed at chip manufacturers moving processes to 110nm and 90nm nodes. The platform integrates two ultra-technologies, optical lithography and mechanical forces, to achieve an equal mastery of both.
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CANON
FPA-6000ES5
Steppers & ScannersVintage: 2003Condition: UsedLast VerifiedOver 60 days agoCANON
FPA-6000ES5
Steppers & ScannersVintage: 2003Condition: UsedLast VerifiedOver 60 days agoCANON
FPA-6000ES5
Steppers & ScannersVintage: Condition: UsedLast Verified3 days agoCANON
FPA-6000ES5
Steppers & ScannersVintage: Condition: UsedLast Verified3 days ago