Description
No descriptionConfiguration
Process: NITR From original tool PO, please inspect to verify Safety Specification SEMI S2-0706/CE Shipping Area ASIA Host Communications Comply with GJG PIO I/F Connection FNC Top Automated Material Handling system OHT PGV Operation None Equipment Host I/F connection Gas Box Top Group Controller AGC External I/F See External Input/Out table FTP None WAVES Version Ver 2.13 (WAVES) Indicator See customer Detail Process Pressure Low pressure Process Temperature 750 Heater type "Mid-Temp.VMM-56-002 5Zone/ 500~1000c" N2 Purge system Installed Boat Operation 2 boats type Carrier ID Reader Writer Type RF(OP) Maker/model OMROM/V700-L21 Privider TEL Warning Label English Temperature controller Furnace Temperature Controller, Model 560A Phase Basic Style Integrated Gas System (STD) Tubing Stainless steel/ Electrical-polish (STD) Tubing bends Bend (Less than 90c) Tube Heating (Include vacuum Line) Use Manual valve Fujikin Air-Operation Valve Fujikin Filter MYKROLIS(Ni) Regulator CKD MFC (Gas panel) HORIBA STEC/DIGITAL Press. Transducer NAGANO Soft Backfill Injector Installed(OP) Manifold Heater NO used Liquid Source Vapor System None Liquid Source auto backfill None (STD) Auto-Refill Tubing interconnect by N/A Auto-Refill Provide By N/A Gas System Schem.Dwg / Parts List 2192-352085-01* Vaccum exhaust system 3inch pipe Pump 1800HTX Pump Provided by Edwards N2 Gas panel for pump provide by TEL Pump FNC Vac provide by Customer (STD) Vaccum Pressure controller CKD VEC Vaccum gauge-Pressure ctrl "MKS(HOT)Capacitance Manometer" Vaccum gauge-Press Monitor-133kpa "MKS(HOT)Capacitance Manometer" Main Valve CKD-VEC Trap Pipe trap Wafer Type 300 SEMI STD-Notch Wafer Notch Aligner Installed (OP) Carrier Type FOUP / 25slots (SEMI STD) Carrier Maker/ Type Entegris/AF3CWAB20BUAFW Carrier Storage Qty 16 W/T Wafer I/F speed (U/D) Standard Fork Type/ Material 1+4 Edge Grip/ A12O3 (STD) Wafer Loading/ Unloading Sequence ED -> P -> M / M ->P ->ED Cap Heater Use Qty.of Production Wafers 100pcs Boat Material SiC Boat Type 141Slots loader Boat Rotation Installed Pedestal Type Quartz Outer/Inner Tube Material Quartz+Quartz Liner Tube Straight Process Tube Outer tube interior wall type(For CVD) Tube Sealing O-ring seal Quartz Maker Requirement See customized details Quartz Provider TEL SIC Maker Requirement See customized details SIC Provider TEL System Controller WAVES Front Operation Panel Installed(OP) Front MMI and Gas Flowchart Installed Signal Tower/ Close Installed/4 colors General Pressure Display Unit Pressure-Mpa/Vac-Torr Gas Cabinet Exhaust Display Unit SI (Pa) Furnace Temperature Controller M560A Phase Gas Detection Provided By TEL Gas Detection System Maker Riken Detected Gas 1/ Point NH3-Gas box Detected Gas 2/ Point SiH2CL2-Gas box Detected Gas 3/ Point Detected Gas 4/ Point Detected Gas 5/ Point Detected Gas 6/ Point Detected Gas 7/ Point Detected Gas 8/ Point Detected Gas 9/ Point Detected Gas 10/ Point Detected Gas 11/ Point Detected Gas 12/ Point Voltage 3 phase 208VAC Voltage 1 phase 120VAC Control Power UPS provided by Customer Ctrl Pwr UPS make/ model Fab-wid system UPS Input Voltage/ Output Voltage N/A Power Input Entrance Location Power Box Top Power Box Downstairs Rapid Cooling Unit Not installed UPS Input Voltage/ Output Voltage Not installed Pump Unit Downstairs Quartz Outer Tube 2105-220822-11 Quartz Inner Tube 2105-322615-11 Quartz Injector 1105-401704-51 Quartz Injector(SBI) 1187-182977-11 Quartz N2 Injector 2105-420544-51 Quartz Manifold heater 2105-220855-51 SiC Boat 2105-120893-11 Quartz pedestal base 2105-220825-51 Quartz Fin (A) 2105-321162-11 Quartz Fin (B) 2105-321184-11 Quartz Cap Cover 2105-220853-51 Quartz shutter 1105-302154-61 HAND VALVE HV1~10 HAND VALVE HV11-15 FILTER F1,6,7 FILTER F2~5,8,9 REGULATOR RG1 REGULATOR RG2,5,6 PRESSURE TRANSDUCER PT1~7 DIGITAL PANEL METER PT1~7 MASS FLOW CONTROLLER MFC-NR MASS FLOW CONTROLLER MFC-NX,N1 MASS FLOW CONTROLLER MFC-NY,N3 MASS FLOW CONTROLLER MFC-N2 MASS FLOW CONTROLLER MFC-M1 MASS FLOW CONTROLLER MFC-M2 MASS FLOW CONTROLLER MFC-D1 MASS FLOW CONTROLLER MFC-J1 MASS FLOW METER MFM-D1 AIR OPERATION VALVE NX2,N12 AIR OPERATION VALVE NY2,N22,32,NR2 AIR OPERATION VALVE M11,21,D11,Z11,Z21,J11 WITH P.S AIR OPERATION VALVE M12-14,22-24,D12-14,Z12-14,Z22-24,J12-14 AIR OPERATION VALVE M15,25,D15,Z15,Z25,J15WITH P.S CHECK VALVE CV1,9,13,17 CHECK VALVE CV2 CHECK VALVE CV21 CHECK VALVE CV3,6 CHECK VALVE CV10,14,18 CHECK VALVE CV22 CHECK VALVE CV5,8,12,16,20,24 CHECK VALVE CV4,7 CHECK VALVE CV11,15,19 CHECK VALVE CV23 REGULATOR UNIT RG7,BV1 REGULATOR UNIT RG8,BV2 REGULATOR UNIT RG9 PRESSURE SWITCH P.SW1,2,14 FILTER F10 AIR OPERATION VALVE NR3 ORIFICE OF1 AIR OPERATION VALVE IV1 WITH P.S AIR OPERATION VALVE IV7 WITH P.S AIR OPERATION VALVE IV2 WITH P.S AIR OPERATION VALVE VV1 WITH P.S AIR OPERATION VALVE VV2 WITH P.S CYCLDER VALVE MV NEEDLE VALVE NV2 CHECK VALVE CV25 CAPACITANCE MANOMETER VG1 CAPACITANCE MANOMETER VG2 CAPACITANCE MANOMETER VG3 PRESSURE SWITCH P.SW11 DRY PUMP UNIT MBP/DP BALL VALVE B21 FILTER F21-22 REGULATOR RG21-22 PRESSURE GAUGE PG21-22 FLOW CONTROL SYSTEM NL,LA1,2 FLOW METER FM NFS,NFA AIR OPERATION VALVE LA3,PB1 BALL VALVE BV22 REGULATOR RG23 PRESSURE SWITCH P.SW21 FILTER F423,24 "2105-220822-11 2105-322615-11" "ID448xH1360 Slim Straight earthquake proof" 1105-401704-51 Straight(SiH2Cl2 ,N2O) N/A 2105-420544-51 L=600 (Back N2) 1187-182977-11 SBI (NH3,H2 line) 1105-302154-61 OD408 For LP-CVD 2105-120893-11 "6.3mm Pitch,141slots Earthquake proof (SiC)" 2105-220853-51 Slim 2105-321162-11 "Large Diameter 8fins:Sandwich" 2105-321184-11 "Small Diameter 4fins:Sandwich" 2105-220853-51 Slim "HV1~10 H11~H15" "FUDDFL-21-6.35UGF-APD FUSDALT-21-6.35UGFX6.35JR-DWX" "FUJIKIN FUJIKIN" F1,6,7 WG3SS2WW2 ENTEGRIS F2~5,8,9 WG3SS1WW2 ENTEGRIS RG1 PGM-H-60-4-1 CKD RG2,5,6 PGM-50-4-1 CKD PT1~7 ZT15-Z20-17110(-0.1~0.5Mpa) NAGANO KEIKI PT1~7 "AM215A2A1170CGM (-0.1~0.5Mpa)" ASAHIKEIKI MFC-N1 SEC-Z522BMGXC-24W2 N2 50SLM STEC MFC-NX SEC-Z522BMGXC-24W2 N2 50SLM STEC MFC-NY SEC-Z512MGXC-24W2 N2 1SLM STEC MFC-M1 SEC-Z512MGXC-24W2 NH3 200SCCM STEC MFC-M2 SEC-Z512MGXC-24W2 NH3 2SLM STEC MFC-D1 SEC-Z512MGXC-24W2 SiH2Cl2 200SCCM STEC MFC-J1 SEC-Z512MGXC-24W2 N2O 500SCCM STEC MFC-N3 SEC-Z512MGXC-24W2 N2 1SLM STEC MFC-N2 SEC-Z512MGXC-24W2 N2 10SLM STEC NX2,N12 FPR-UDDFA-21-6.35UGF-APD FUJIKIN NY2,N22,32,NR2 FPR-SDA-21-6.35UGF-ADP FUJIKIN M11,21,D11,Z11,Z21,J11 WITH P.S FBSDAL-RS20-6.35UGF-2B3-DVD FUJIKIN M12-14,22-24,D12-14,Z12-14,Z22-24,J12-14 FBSDAL-6.35UGF-2B3-DVD FUJIKIN "CV1,9,13,17 CV2 CV21" "FUCDF-21-3.35-AKH FUCDF-21-3.35-CR-AKH FUCDF-21-3.35-ER-AKH" "FUJIKIN FUJIKIN FUJIKIN" "CV3,6 CV10,14,18 CV22 CV5,8,12,16,20,24 CV4,7 CV11,15,19 CV23" "FUCL-71-6.35JRx6.35UGF-0.023-CR-APD FUCL-71-6.35JRx6.35UGF-0.023-APD FUCL-71-6.35JRx6.35UGF- 0.023-ER-APD FUCL-71-6.35UGFx6.35JR-0.023-KA-APD FUCL-71-6.35UGFx6.35JR-0.023-CR-APD FUCL-71-6.35UGFx6.35JR-0.023-APD FUCL-71-6.35UGFx6.35JR-0.023-ER-APD" "FUJIKIN FUJIKIN FUJIKIN FUJIKIN FUJIKIN FUJIKIN FUJIKIN" M15,25,D15,Z15,Z25,J15WITH P.S FBSDAL-RS2-6.35UGF-1B3-CKP FUJIKIN MFC-NR SEC-Z512MGXC-24W2 N2 50SCCM STEC F10 GSG-V4-1-N MOTT NR3 FPR-SD-71-6.35 FUJIKIN IV1 WITH P.S FPR-71-RS1-9.52-PA FUJIKIN IV7 WITH P.S FPR-71-RS1-9.52-PA-BR FUJIKIN IV2 WITH P.S FP-71RS1-6.35-PA FUJIKIN VV1 WITH P.S FPR-71-9.52-2-PA-BR FUJIKIN VV2 WITH P.S FPR-71-9.52--PA FUJIKIN CV25 IC8-3/1-VUA-48 KITZ NV2 FUBFN-71-6.35-DFZ FUJIKIN MV VEC-SH8G-X0101 CKD VG1, VG3 "631C11T8FHBB 623A-14861-SSPCS" "MKS MKS" VG2 631C13T8FHBB MKS P.SW11 223B-22809 MKS MBP/DP IH1800HTX EDWARDS RG7, BV1 AC26X-02-X2117 SMC RG8, BV2 AC26X-02-X2116 SMC RG9 AR25-02B SMC P.SW1,2,14 AP-33PA KEYENCE B21 G-353219-3/4 IHARA F21-22 GF-D50L NIPPON SEISEN RG21-22 RC2000-X0005 CKD PG21-22 G49D-6-P10-P9 CKD NL,LA1,2 KHT-X0062-FL362759 CKD FM NFS,NFA RK2006CKD-FC301874 KOFLOC LA3, PB1 ADG11V-4S CKD F23,24 WGMXMBSS3 ENTEGRIS BV22 G-353219-1/4 IHARA RG23 2619-1C-N-P90 CKD P.SW21 PPD3-R10P-6B CKD Damage/Missing parts list Please inspect tool to reconfirm Dry pumps not included on salesOEM Model Description
The Alpha-303i is a 300mm production tool developed by Tokyo Electron. It is the result of years of research and development, with TEL having completed their 300mm batch furnace prototype in 1995. Since then, TEL has delivered numerous atmospheric and LP CVD systems to multiple customer sites and consortia worldwide. The Alpha-303i includes key features such as a 100 product wafer load size, a high-speed multiple-wafer loading system with optical notch alignment, and a Front-Opening Unified Pod (FOUP) interface that is configurable for overhead transfer systems (OHT) and personal guided vehicles (PGV). Additionally, boat rotation is standard on all processes, and a Fast Thermal Processing System (FTP) is available for both atmospheric and CVD systems. This tool reinforces TEL’s commitment to being production ready for the 300mm era of semiconductor manufacturing.Documents
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TEL / TOKYO ELECTRON
ALPHA(α)-303i
Verified
CATEGORY
Furnaces / Diffusion
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
18662
Wafer Sizes:
12"/300mm
Vintage:
2010
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TEL / TOKYO ELECTRON
ALPHA(α)-303i
Verified
CATEGORY
Furnaces / Diffusion
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
18662
Wafer Sizes:
12"/300mm
Vintage:
2010
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Process: NITR From original tool PO, please inspect to verify Safety Specification SEMI S2-0706/CE Shipping Area ASIA Host Communications Comply with GJG PIO I/F Connection FNC Top Automated Material Handling system OHT PGV Operation None Equipment Host I/F connection Gas Box Top Group Controller AGC External I/F See External Input/Out table FTP None WAVES Version Ver 2.13 (WAVES) Indicator See customer Detail Process Pressure Low pressure Process Temperature 750 Heater type "Mid-Temp.VMM-56-002 5Zone/ 500~1000c" N2 Purge system Installed Boat Operation 2 boats type Carrier ID Reader Writer Type RF(OP) Maker/model OMROM/V700-L21 Privider TEL Warning Label English Temperature controller Furnace Temperature Controller, Model 560A Phase Basic Style Integrated Gas System (STD) Tubing Stainless steel/ Electrical-polish (STD) Tubing bends Bend (Less than 90c) Tube Heating (Include vacuum Line) Use Manual valve Fujikin Air-Operation Valve Fujikin Filter MYKROLIS(Ni) Regulator CKD MFC (Gas panel) HORIBA STEC/DIGITAL Press. Transducer NAGANO Soft Backfill Injector Installed(OP) Manifold Heater NO used Liquid Source Vapor System None Liquid Source auto backfill None (STD) Auto-Refill Tubing interconnect by N/A Auto-Refill Provide By N/A Gas System Schem.Dwg / Parts List 2192-352085-01* Vaccum exhaust system 3inch pipe Pump 1800HTX Pump Provided by Edwards N2 Gas panel for pump provide by TEL Pump FNC Vac provide by Customer (STD) Vaccum Pressure controller CKD VEC Vaccum gauge-Pressure ctrl "MKS(HOT)Capacitance Manometer" Vaccum gauge-Press Monitor-133kpa "MKS(HOT)Capacitance Manometer" Main Valve CKD-VEC Trap Pipe trap Wafer Type 300 SEMI STD-Notch Wafer Notch Aligner Installed (OP) Carrier Type FOUP / 25slots (SEMI STD) Carrier Maker/ Type Entegris/AF3CWAB20BUAFW Carrier Storage Qty 16 W/T Wafer I/F speed (U/D) Standard Fork Type/ Material 1+4 Edge Grip/ A12O3 (STD) Wafer Loading/ Unloading Sequence ED -> P -> M / M ->P ->ED Cap Heater Use Qty.of Production Wafers 100pcs Boat Material SiC Boat Type 141Slots loader Boat Rotation Installed Pedestal Type Quartz Outer/Inner Tube Material Quartz+Quartz Liner Tube Straight Process Tube Outer tube interior wall type(For CVD) Tube Sealing O-ring seal Quartz Maker Requirement See customized details Quartz Provider TEL SIC Maker Requirement See customized details SIC Provider TEL System Controller WAVES Front Operation Panel Installed(OP) Front MMI and Gas Flowchart Installed Signal Tower/ Close Installed/4 colors General Pressure Display Unit Pressure-Mpa/Vac-Torr Gas Cabinet Exhaust Display Unit SI (Pa) Furnace Temperature Controller M560A Phase Gas Detection Provided By TEL Gas Detection System Maker Riken Detected Gas 1/ Point NH3-Gas box Detected Gas 2/ Point SiH2CL2-Gas box Detected Gas 3/ Point Detected Gas 4/ Point Detected Gas 5/ Point Detected Gas 6/ Point Detected Gas 7/ Point Detected Gas 8/ Point Detected Gas 9/ Point Detected Gas 10/ Point Detected Gas 11/ Point Detected Gas 12/ Point Voltage 3 phase 208VAC Voltage 1 phase 120VAC Control Power UPS provided by Customer Ctrl Pwr UPS make/ model Fab-wid system UPS Input Voltage/ Output Voltage N/A Power Input Entrance Location Power Box Top Power Box Downstairs Rapid Cooling Unit Not installed UPS Input Voltage/ Output Voltage Not installed Pump Unit Downstairs Quartz Outer Tube 2105-220822-11 Quartz Inner Tube 2105-322615-11 Quartz Injector 1105-401704-51 Quartz Injector(SBI) 1187-182977-11 Quartz N2 Injector 2105-420544-51 Quartz Manifold heater 2105-220855-51 SiC Boat 2105-120893-11 Quartz pedestal base 2105-220825-51 Quartz Fin (A) 2105-321162-11 Quartz Fin (B) 2105-321184-11 Quartz Cap Cover 2105-220853-51 Quartz shutter 1105-302154-61 HAND VALVE HV1~10 HAND VALVE HV11-15 FILTER F1,6,7 FILTER F2~5,8,9 REGULATOR RG1 REGULATOR RG2,5,6 PRESSURE TRANSDUCER PT1~7 DIGITAL PANEL METER PT1~7 MASS FLOW CONTROLLER MFC-NR MASS FLOW CONTROLLER MFC-NX,N1 MASS FLOW CONTROLLER MFC-NY,N3 MASS FLOW CONTROLLER MFC-N2 MASS FLOW CONTROLLER MFC-M1 MASS FLOW CONTROLLER MFC-M2 MASS FLOW CONTROLLER MFC-D1 MASS FLOW CONTROLLER MFC-J1 MASS FLOW METER MFM-D1 AIR OPERATION VALVE NX2,N12 AIR OPERATION VALVE NY2,N22,32,NR2 AIR OPERATION VALVE M11,21,D11,Z11,Z21,J11 WITH P.S AIR OPERATION VALVE M12-14,22-24,D12-14,Z12-14,Z22-24,J12-14 AIR OPERATION VALVE M15,25,D15,Z15,Z25,J15WITH P.S CHECK VALVE CV1,9,13,17 CHECK VALVE CV2 CHECK VALVE CV21 CHECK VALVE CV3,6 CHECK VALVE CV10,14,18 CHECK VALVE CV22 CHECK VALVE CV5,8,12,16,20,24 CHECK VALVE CV4,7 CHECK VALVE CV11,15,19 CHECK VALVE CV23 REGULATOR UNIT RG7,BV1 REGULATOR UNIT RG8,BV2 REGULATOR UNIT RG9 PRESSURE SWITCH P.SW1,2,14 FILTER F10 AIR OPERATION VALVE NR3 ORIFICE OF1 AIR OPERATION VALVE IV1 WITH P.S AIR OPERATION VALVE IV7 WITH P.S AIR OPERATION VALVE IV2 WITH P.S AIR OPERATION VALVE VV1 WITH P.S AIR OPERATION VALVE VV2 WITH P.S CYCLDER VALVE MV NEEDLE VALVE NV2 CHECK VALVE CV25 CAPACITANCE MANOMETER VG1 CAPACITANCE MANOMETER VG2 CAPACITANCE MANOMETER VG3 PRESSURE SWITCH P.SW11 DRY PUMP UNIT MBP/DP BALL VALVE B21 FILTER F21-22 REGULATOR RG21-22 PRESSURE GAUGE PG21-22 FLOW CONTROL SYSTEM NL,LA1,2 FLOW METER FM NFS,NFA AIR OPERATION VALVE LA3,PB1 BALL VALVE BV22 REGULATOR RG23 PRESSURE SWITCH P.SW21 FILTER F423,24 "2105-220822-11 2105-322615-11" "ID448xH1360 Slim Straight earthquake proof" 1105-401704-51 Straight(SiH2Cl2 ,N2O) N/A 2105-420544-51 L=600 (Back N2) 1187-182977-11 SBI (NH3,H2 line) 1105-302154-61 OD408 For LP-CVD 2105-120893-11 "6.3mm Pitch,141slots Earthquake proof (SiC)" 2105-220853-51 Slim 2105-321162-11 "Large Diameter 8fins:Sandwich" 2105-321184-11 "Small Diameter 4fins:Sandwich" 2105-220853-51 Slim "HV1~10 H11~H15" "FUDDFL-21-6.35UGF-APD FUSDALT-21-6.35UGFX6.35JR-DWX" "FUJIKIN FUJIKIN" F1,6,7 WG3SS2WW2 ENTEGRIS F2~5,8,9 WG3SS1WW2 ENTEGRIS RG1 PGM-H-60-4-1 CKD RG2,5,6 PGM-50-4-1 CKD PT1~7 ZT15-Z20-17110(-0.1~0.5Mpa) NAGANO KEIKI PT1~7 "AM215A2A1170CGM (-0.1~0.5Mpa)" ASAHIKEIKI MFC-N1 SEC-Z522BMGXC-24W2 N2 50SLM STEC MFC-NX SEC-Z522BMGXC-24W2 N2 50SLM STEC MFC-NY SEC-Z512MGXC-24W2 N2 1SLM STEC MFC-M1 SEC-Z512MGXC-24W2 NH3 200SCCM STEC MFC-M2 SEC-Z512MGXC-24W2 NH3 2SLM STEC MFC-D1 SEC-Z512MGXC-24W2 SiH2Cl2 200SCCM STEC MFC-J1 SEC-Z512MGXC-24W2 N2O 500SCCM STEC MFC-N3 SEC-Z512MGXC-24W2 N2 1SLM STEC MFC-N2 SEC-Z512MGXC-24W2 N2 10SLM STEC NX2,N12 FPR-UDDFA-21-6.35UGF-APD FUJIKIN NY2,N22,32,NR2 FPR-SDA-21-6.35UGF-ADP FUJIKIN M11,21,D11,Z11,Z21,J11 WITH P.S FBSDAL-RS20-6.35UGF-2B3-DVD FUJIKIN M12-14,22-24,D12-14,Z12-14,Z22-24,J12-14 FBSDAL-6.35UGF-2B3-DVD FUJIKIN "CV1,9,13,17 CV2 CV21" "FUCDF-21-3.35-AKH FUCDF-21-3.35-CR-AKH FUCDF-21-3.35-ER-AKH" "FUJIKIN FUJIKIN FUJIKIN" "CV3,6 CV10,14,18 CV22 CV5,8,12,16,20,24 CV4,7 CV11,15,19 CV23" "FUCL-71-6.35JRx6.35UGF-0.023-CR-APD FUCL-71-6.35JRx6.35UGF-0.023-APD FUCL-71-6.35JRx6.35UGF- 0.023-ER-APD FUCL-71-6.35UGFx6.35JR-0.023-KA-APD FUCL-71-6.35UGFx6.35JR-0.023-CR-APD FUCL-71-6.35UGFx6.35JR-0.023-APD FUCL-71-6.35UGFx6.35JR-0.023-ER-APD" "FUJIKIN FUJIKIN FUJIKIN FUJIKIN FUJIKIN FUJIKIN FUJIKIN" M15,25,D15,Z15,Z25,J15WITH P.S FBSDAL-RS2-6.35UGF-1B3-CKP FUJIKIN MFC-NR SEC-Z512MGXC-24W2 N2 50SCCM STEC F10 GSG-V4-1-N MOTT NR3 FPR-SD-71-6.35 FUJIKIN IV1 WITH P.S FPR-71-RS1-9.52-PA FUJIKIN IV7 WITH P.S FPR-71-RS1-9.52-PA-BR FUJIKIN IV2 WITH P.S FP-71RS1-6.35-PA FUJIKIN VV1 WITH P.S FPR-71-9.52-2-PA-BR FUJIKIN VV2 WITH P.S FPR-71-9.52--PA FUJIKIN CV25 IC8-3/1-VUA-48 KITZ NV2 FUBFN-71-6.35-DFZ FUJIKIN MV VEC-SH8G-X0101 CKD VG1, VG3 "631C11T8FHBB 623A-14861-SSPCS" "MKS MKS" VG2 631C13T8FHBB MKS P.SW11 223B-22809 MKS MBP/DP IH1800HTX EDWARDS RG7, BV1 AC26X-02-X2117 SMC RG8, BV2 AC26X-02-X2116 SMC RG9 AR25-02B SMC P.SW1,2,14 AP-33PA KEYENCE B21 G-353219-3/4 IHARA F21-22 GF-D50L NIPPON SEISEN RG21-22 RC2000-X0005 CKD PG21-22 G49D-6-P10-P9 CKD NL,LA1,2 KHT-X0062-FL362759 CKD FM NFS,NFA RK2006CKD-FC301874 KOFLOC LA3, PB1 ADG11V-4S CKD F23,24 WGMXMBSS3 ENTEGRIS BV22 G-353219-1/4 IHARA RG23 2619-1C-N-P90 CKD P.SW21 PPD3-R10P-6B CKD Damage/Missing parts list Please inspect tool to reconfirm Dry pumps not included on salesOEM Model Description
The Alpha-303i is a 300mm production tool developed by Tokyo Electron. It is the result of years of research and development, with TEL having completed their 300mm batch furnace prototype in 1995. Since then, TEL has delivered numerous atmospheric and LP CVD systems to multiple customer sites and consortia worldwide. The Alpha-303i includes key features such as a 100 product wafer load size, a high-speed multiple-wafer loading system with optical notch alignment, and a Front-Opening Unified Pod (FOUP) interface that is configurable for overhead transfer systems (OHT) and personal guided vehicles (PGV). Additionally, boat rotation is standard on all processes, and a Fast Thermal Processing System (FTP) is available for both atmospheric and CVD systems. This tool reinforces TEL’s commitment to being production ready for the 300mm era of semiconductor manufacturing.Documents
No documents
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ALPHA(α)-303i
Furnaces / DiffusionVintage: 0Condition: UsedLast Verified: 24 days agoTEL / TOKYO ELECTRON
ALPHA(α)-303i
Furnaces / DiffusionVintage: 0Condition: UsedLast Verified: 24 days agoTEL / TOKYO ELECTRON
ALPHA(α)-303i
Furnaces / DiffusionVintage: 0Condition: UsedLast Verified: 24 days agoTEL / TOKYO ELECTRON