Used SEN CORPORATION / SUMITOMO NV GSD HE for Sale

Description

Details attached.

Configuration

Gas Box: Gas line #1: HP(Ar) Tylan 2900 Gas line #2: HP (BF3) UNIT 8162 Gas line #3 : SDS PH3 MKS 1640A Gas line #4: SDS ASH3 MKS 1640A Isolation transformer type: OIL type Injector Module: Source type : ELS / Non-Vaporizer Extraction electrode type : 3-Axis electrode Bushing type : Red P1 Model : Boc Edwards STP-2000C S/N:M697030 RP1 Model: Ebara 40X20 Dry Pump P8: N/A Facilities Module: Machine Transformer Select: Dry type Triple loops chiller x1: Affinity CWA-300L-VHE-3LP P/N:10185 S/N:006366 Disk Chiller: Affinity RWA-012T-BE03CB P/N:7666 S/N:005752 Compressors X2 : CTI Cryogenic 9600 S/N:94E980954 CTI Cryogenic 9600 Linac Module: Injector Faraday : ok CVA : N/A P4 Model : Leybold Turbovac 1000C S/N:A961300110 P5 Model: Leybold Turbovac 1000C S/N:A961300107 RP2 Model: Ebara 40X20 Dry Pump RFG Model : RFG-3000x4ea, RFG-3001x6ea FEM Module: FEM Power :EMS:03-165-2-D P/N:00473110 S/N:26N6707 EMS:03-165-2-D P/N:00473110 S/N:27A1493 FEM Guss : P/N:1182890 End Station Module: IG1/IG3 Contoller: 307 TYPE CONTROLLER IG3: Ion Gauge Tapy:274012 In-Air Controller Type: 4-Axis DI A19077 Assy No:1520960 Robot Controller Type(Macobot controller): 4-Axis DI A42891 Assy No:1520960 Y-Scan Controller Type: Amplifier P97801092 Gyro Controller Type: 4-Axis DI A06078 Assy No:1520960 P/N:1177580 S/N:113137 Dose Controller Type: Universal B43017 Assy No:152060 Secondly Sun: N/A RGA:N/A SMIF:N/A Disk Module: P2 Model: CTI Cryogenic OB 8 S/N:J02114998 P3 Model: CTI Cryogenic OB 10 S/N:RC9810276 P9 Model : CTI Cryogenic OB 250F S/N:G02101122 RP4 Model: Ebara 40X20 Dry Pump Flag Faraday: Standard E-Shower :N/A Ar/Xe Bleed MFC: :N/A In-Vac Arm: ok Wafer Holder: ok Gyro: ok Linear Drive: ok Disk faraday: OK Resolver faraday: OK Disk Model: Si coating S/N:110001741-1486 Rotary Motor Type: belt Drive p/n: 152164 Vacuum Cassette Elevator Type: GRTV TYPE NOT VESPEL X1 Notch/Flat Finder: Notch Dummy Cassette :1 Load Buffer : 1 Load buffer cassette #2: N/A E/S Elec Rack / Quad Console Module: Quad Rack MODULE:1178680 QUADRAPLE Power Supply DI: OK QUADRAPLE Power SupplyX5: OK E/S ELEC RACK MODULE:178580 E-Shower P/S: N/A Cell Controller Model : 133 P/N:1191297 S/N:83871 Ground DI: S/N:P826986 DI POWER CONDITIONER : OK GYRO CONTROLLER: OK LOADLOCKCONTROLLER: S/N:0001-140946

OEM Model Description

The SEN Corporation / Sumitomo NV-GSD-HE is a globally recognized high-energy ion implantation system designed for 200mm, 150mm, and 125mm wafers, offering exceptional productivity in the energy range of up to 3 MeV. It supports an energy range between 10 keV and 3,000 keV, providing increased acquisition energy and improved efficiency through RF acceleration using RF resonators. The system features enhanced beam current at high energy levels due to optimized mass analyzing magnet and FEM (Final Energy Magnet). For higher implantation efficiency, it offers the option of installing a CVA (Continuous Variable Aperture). The NV-GSD-HE ensures high accuracy of implantation and maintains high beam quality by minimizing metal contamination and cross-contamination. The optional VSD (Virtual Slit Disk) and TSDF (Triple Surface Disk Faraday) further reduce cross-contamination.