Description
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CHA SE-1000-RAP Multisource E Beam and Thermal Evaporation System for Optical Films and Oxygen Reactive Evaporations. Used thin film deposition system. Inficon IC-4 Plus rate and deposition controller. Six pocket electron beam source with SR-10 E-Beam power supply. Parts for optical monitor with system but not tested or covered under warranty. Two outrigger style filament resistance sources with 6 kW SCR controlled power supply. Automatic valve sequence controller. 25 in. dia. x 30 in. tall water cooled bell jar. Pressure control system for oxygen reactive evaporations. VHS-10 high speed diffusion pump with roughing pump. Quartz substrate heaters. Slide type fixturing for lift off process. Does not use substrate rotation type fixturing.OEM Model Description
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CHA
SEC 1000-RAP
Verified
CATEGORY
Thermal Evaporators
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
16362
Wafer Sizes:
Unknown
Vintage:
Unknown
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SEC 1000-RAP
Verified
CATEGORY
Thermal Evaporators
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
16362
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
CHA SE-1000-RAP Multisource E Beam and Thermal Evaporation System for Optical Films and Oxygen Reactive Evaporations. Used thin film deposition system. Inficon IC-4 Plus rate and deposition controller. Six pocket electron beam source with SR-10 E-Beam power supply. Parts for optical monitor with system but not tested or covered under warranty. Two outrigger style filament resistance sources with 6 kW SCR controlled power supply. Automatic valve sequence controller. 25 in. dia. x 30 in. tall water cooled bell jar. Pressure control system for oxygen reactive evaporations. VHS-10 high speed diffusion pump with roughing pump. Quartz substrate heaters. Slide type fixturing for lift off process. Does not use substrate rotation type fixturing.OEM Model Description
None ProvidedDocuments
No documents