BLUEICE PRIME
Category
Wet Benches - AutoOverview
Single wafer cleaner. Process performance: High grade process (19nm particle removal). Defect free technology. Productivity / Hardware: Contamination free clean by NIC bowl. SF-aerosol : High velocity/uniformity droplet. Smart system : APAC (Auto Flow Control). AIS (Auto Inspection System). SEAS (Smart Equipment Analysis System).
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