Developing, designing, manufacturing for wafer & LCD substrate handling robot and loader/unloader integrated with robot.

AITEC

AR-S300H+AL

Wafer vacuum robots
Type: Single Arm
Wafer Size: ～450mm
A(B)-axis (mm): 705
θ-axis(°): ∞
Z-axis (mm): 50
Transport weight (kg): 6

Glass vacuum robots
Glass size: ～2200＊2500
A(B)-axis (mm): 2520/3640
θ-axis(°): ∞
Z-axis(mm): 600/780
Transport weight(kg): 50/130

Glass atmosphere robots
GlassSize: ～550＊650
A(B)-axis (mm): 1120
θ-axis(°): 330
Z-axis (mm): 400/520/600
Transport weight (kg): 5

Wafer vacuum robots
Type: Double Arm
Wafer Size: ～450mm
A(B)-axis (mm): 760
θ-axis(°): ∞
Z-axis (mm): 50
Transport weight (kg): 2

Glass atmosphere robots
GlassSize: ～550＊650
A(B)-axis (mm): 1480～1840
θ-axis(°): 330
Z-axis (mm): 400～1000
R-axis（°): 185°
Transport weight (kg): 4～8

Glass Size: ～550＊650
A(B)-axis (mm): 1030
θ-axis(°): 330
Z-axis(mm): 100
Transport weight(kg): 4

Glass vacuum robots
Glass Size: ～1300＊1500
A(B)-axis (mm): 2380
θ-axis(°): ∞
Z-axis(mm): 350
Transport weight(kg): 50

Wafer Atmosphere Robots
Type: Double Arm
Wafer Size: ～450mm
A(B)-axis (mm): 510
θ-axis(°): 330
Z-axis (mm): 300
Transport weight (kg): 3

Glass Size: ～1100＊1300
A(B)-axis (mm): 1750
θ-axis(°): ∞
Z-axis(mm): 350
Transport weight(kg): 20/15

Wafer Atmosphere Robots
Type: Revers Single Arm
Wafer Size: ～300mm
A(B)-axis (mm): 510
θ-axis(°): 330
Z-axis (mm): 300
Transport weight (kg): 3

Glass atmosphere robots
GlassSize: ～730＊920
A(B)-axis (mm): 1460
θ-axis(°): 330
Z-axis (mm): 800/1000
Transport weight (kg): 10

Wafer Atmosphere Robots
Type: Single Arm
Wafer Size: ～450mm
A(B)-axis (mm): 510
θ-axis(°): 330
Z-axis (mm): 300
Transport weight (kg): 3

Wafer vacuum robots
Type: Double Arm
Wafer Size: ～300mm
A(B)-axis (mm): 545
θ-axis(°): ∞
Z-axis (mm): 50
Transport weight (kg): 2