Overview

The Opti-Probe 7341XP is a thin-film and critical dimension (CD) metrology tool developed by Therma-Wave. It is an extension of their widely deployed Opti-Probe line of thin-film measurement tools and delivers a metrology solution for high-volume 65nm chip production that yields better precision and productivity than earlier generation Opti-Probes. The tool has demonstrated an improvement in performance for its customers’ most critical thin-film and optical CD applications by a factor of up to two times. It leverages Therma-Wave’s field-proven Series-7 Opti-Probe platform, which combines five distinct film measurement technologies needed to meet the increasingly complex demands of process control.