Ultratech Stepper, Model Spectrum 3e
- Universal Chuck for 4",5", 6" & 8" wafers
- 2um resolution
- 1200W illuminator(GHI)
- Patmax system
- Genmark robotic wafer handler
- 12 slot reticle library
- 44x26.7 light pipe
- Filter changer

Veeco Instruments Inc. a global leader of advanced thin film etch and deposition process equipment, acquired Ultratech, Inc. a leading supplier of lithography, laser-processing and inspection systems used to manufacture semiconductor devices and LEDs.

VEECO / ULTRATECH

The Ultratech Saturn Spectrum 3e is a lithography stepper from Ultratech Stepper Inc. that is designed for high-volume flip-chip (bump) and wafer-level packaging manufacturing. It features an improved machine vision system (MVS) with the addition of the PatMAX architecture, which is a pattern recognition-based alignment system that eliminates the need for dedicated targets and simplifies integration with existing processes. The Saturn Spectrum 3e also has improved illumination, providing an increased wafer plane irradiance of 1900 mW/cm2, resulting in decreased exposure times and improved productivity. Additionally, the tool incorporates an automated field aperture changer to enable faster reticle field size changes, as well as an automated broadband ghi-line filter changer, allowing automated switching between either g, h or i-line exposure capabilities.

SATURN SPECTRUM 3e

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VEECO / ULTRATECH

SATURN SPECTRUM 3e

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