For 350 nm Device Mass Production
Thanks to the employment of new, highly enhanced illumination, along with a reduction in stepping and alignment time, the NSR-2205i14E2 features a high throughput of 103 wafers per hour (for 200 mm wafers).

Semiconductors control a host of functions in electronic equipment. Nikon offers a stellar lineup of cutting-edge lithography systems that support precision circuit design down to the nanometer level.

NIKON

NSR-2205i14E2

NSR-2205i14E2.mov

NSR-2205i14E2..mov

NIKON NSR-2205i14E2.pdf

NSR-2205i14E2.pdf

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Resolution =0.35um
Long Term Focus Stability	Within + 0.2um	0. 4um pattern(CE) Average Value from previous days="3" 0. 4um
Magnification Control Vs. Lens Heating	Within 0. 02um	NIKON standard LC Test Condition (Heat & Cool Test)
Auto focus repeatability	+0. 1um	
Total Focus Deviation	0.0 35um	0. 4um V/H pattern 5pts 0. 4um V/H 5
Lens distortion	Within +0.05um
Max expose filed 22.0x22.0mm  3days 3 measurement 3	
Reticle blind setting accuracy	+0. 4 to +0. 8mm on reticle	NIKON standard Test Condition
Exposure power	650mw/cm2	new lamp
Integrated exposure control	within I 1.0%	input time: 100msec 200msec 400msec
Illumination uniformity	Within 1.4%	3 times measurement with exposure area
Reticle rotation	+3o<20um	Nikon standard Test condition Nikon
Array orthogonality	Within +0. 1sec	After software compensation	After software compensation
Stepping precision	Within 0. 45um (3g)	Nikon standard test	Nikon standard test
Alignment accuracy (1) LSA (2) FIA	(1) M +3o<0.06 (2) M +3o<0.065	10 points EGA	10 points EGA
Stepping rate	27sec or less (150mm)	Exposure time: 130msec	Exposure time: 130msec
Wafer pre-alignment 2 repeatability	3g <15um	20 times measurement for x,y and 6 on same wafer	times measurement for x,y and 6 on same wafer
Chip leveling accuracy	Within +1. 5sec	10 times measurement	10 times measurement
Wafer System Operation Test	>99%	200Wafers	200Wafers
Reticle System Operation Test	100%	Each 1 time for every slot	1 time for every slot
Wafer flatness	2. 5um	Nikon standard test	Nikon standard test



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Nikon NSR-2205i14E2  (1).pdf

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6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

NSR-2205i14E2

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